Pulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited.

2023年9月1日 · We review these typical PLD arrangements, for which we examine the changes in the laser spot size and shape along the scan. To this end, we provide a complete set of equations of the area and eccentricity of the spot as functions of the PLD set-up parameters.

Deposition techniques such as ion-beam, rf, or dc magnetron sputtering, electron-beam evaporation, molecular beam epitaxy, chemical vapor deposition, and metal organic chemical vapor deposition,...

Pulsed Laser Deposition (PLD) has turned out to be the method of choice for the fabrication of high quality ceramic or metal thin films of simple and complex stoichiometry1). The beam of an energetic pulsed excimer laser was focused onto a target.

2024年11月29日 · Pulsed Laser Deposition (PLD) is a versatile thin-film deposition technique widely used in materials science, electronics, and optics. Central to the success of this method are the PLD targets, which play a crucial role in determining the quality and properties of …

pld作为一种 真空物理 沉积方法，当一束强的 脉冲激光 照射到靶材上时，靶表面材料就会被激光所加热，熔化，气化直至变成等离子体（通常在气氛气体中）从靶向衬底传输，最后输运到衬底上的烧蚀物在衬底上凝聚，成核至形成薄膜。

PLD 依靠强大的准分子激光器进行各种薄膜的化学计量生产，从高级电池研究到超导带材的批量生产。 有许多方法可以生产用于电子、光学和光子应用的各种类型的薄膜，例如热蒸发、反应 …

Pulsed laser deposition (PLD) is a simple and extremely versatile technique to grow thin films and nanomaterials of a wide variety of materials. PLD allows the deposition of profoundly different materials, including high-temperature superconductors, oxides, nitrides, carbides, semiconductors, metals, and even polymers or fullerenes with high ...

In this chapter we review results on the effect of pulse duration upon the characteristics of nanostructures synthesized by PLD with ns, sub-ps and fs laser pulses.

脉冲激光沉积（Pulsed Laser Deposition，PLD）制膜技术是利用高能激光束作为热源来轰击待蒸发材料，然后在基片上蒸镀薄膜的一种新技术。 激光光源可以采用准分子激光、CO2激光、Ar激光、钕玻璃激光、红宝石激光及…