单步工艺主要介绍AlN和PZT两种典型压电材料的生长和图形化工艺，以及几个重要的MEMS单步工艺。 器件工艺则是介绍基于AlN和PZT的PMUT器件的晶圆级制造工艺。

2022年6月27日 · Microelectromechanical systems (MEMS) integrated with piezoelectric thin films such as lead zirconate titanate (PZT) and aluminum scandium nitride (AlScN) have

2012年11月1日 · This article reviews piezoelectric MEMS (piezo MEMS) technologies using PZT thin films in radio frequency (RF) devices for communications and radar applications and in the emerging field of millimeter-scale robotics. The electromechanical material properties of thin-film PZT uniquely enable insect-inspired and insect-scale autonomous robots.

2022年2月28日 · A micro-electromechanical system (MEMS) piezoelectric accelerometer was designed and manufactured with four L-shaped beams covered by Lead Zirconate Titanate (PZT) thin film with 1 μm in thickness which was deposited using sol-gel methods.

A self-powered PZT based MEMS sensor is designed and developed with a novel fabrication technique. This proposed technique to fix Ag/PZT/Ag diaphragm on frontside of through-hole cavity developed in silicon performs as good as other diaphragm deposition techniques such as Sol-gel, sputtering which are commonly used in MEMS-based fabrication.

2025年3月15日 · The performance of PbZr0.52Ti0.48O3 (PZT)-based microelectromechanical systems (MEMS) and other piezoelectric devices can be significantly enhanced by optimizing crystallographic texture, which directly influences polarization switching and electromechanical response. However, the combined effect of texture and residual stress on the nonlinear behavior of PZT remains poorly understood ...

This study fabricated a resonant torsional micro-electromechanical systems (MEMS) electric field sensor based on flexible piezoelectric lead zirconate titanate (PZT) thin-film actuation, aimed at addressing limitations observed in the existing and developing electric field sensor devices.

2025年3月20日 · The lightweight micro rotation (MR) stages with the advantage of realizing controllable movement in limited space, offer extensive application potenti…

2017年7月20日 · Lead zirconate titanate (PZT) is a ferroelectric that has excellent piezoelectric, mechanical, and electrical properties. This paper explores why PZT is a useful material in RF MEMS systems and reviews recent advances in the field of PZT based RF MEMS devices.

2025年3月20日 · A ferroelectric PZT is usually used in pMUT devices as the piezoelectric active layer due to its high piezoelectric properties 35, 36.