2014年1月1日 · We report on the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. We developed an original process to combine state of the art sol-gel …

2018年4月24日 · In the present work, we developed a dual diaphragm, piezoelectrically actuated (PZT) valveless micropump using a simple fabrication technique to precisely control the fluid …

2022年6月13日 · 本文主要针对通过泵体的收缩/扩张实现液体传递的微泵。 微泵的致动方式很多，压电、静电、电磁、热驱动等方式，但最终都是为了实现泵体的体积变化。 驱动方式的不 …

2023年6月5日 · Herein, we propose a high-flowrate and high-pressure load valveless piezoelectric micropump with dimensions of 16 mm*16 mm*5 mm. The working frequency, …

2024年5月25日 · Revathi et al. fabricated a micropump featuring a composite-based PZT actuator and designed an identical pair of diffuser/nozzle elements. They achieved a flow rate of 11.34 …

2016年10月15日 · We fabricated a functional micro-pump made of silicon and PZT thin films with standard MEMS technology. This pump can self-prime, works in both ways and pumps both …

The design, fabrication and characterization of a PZT-driven micropump is presented in this paper. It consists of a chamber, a membrane, two microvalves and a d

This study applies the PZT actuator as the driving source of the micro-pump, which is used to circulate fuel within a DMFC power system. It conquered the usual disadvantage of high …

2004年1月9日 · This paper describes a micropump composed of a piezoelectric PZT unimorph and one-way parylene valves. Two different designs of the valves (cantilever- and bridge-type) …

2009年5月26日 · A gas-jet micro pump with novel cross-junction channel has been designed and fabricated using a Si micromachining process. The valveless micro pump is composed of a …