压电微机械超声换能器（Piezoelectric Micromachined Ultrasonic Transducer，PMUT）在各领域展现出多方面优势，尤其是以小尺寸、高性能、低功耗为代表，PMUT对目前主流的音频器件和超声器件来说，是替代性的下一代技术。 前文“压电微机械超声换能器（上）原理与应用”将PMUT进行了一个拉通式的简介，主要偏应用，大约比科普深一点，比专业浅一点的样子。 本文将进一步解析PMUT的器件结构和系统级设计方法，首先是针对PMUT的单管结构分析，随后重点 …

2023年7月21日 · PMUTs are micromembrane ultrasound transducers backed by an acoustic cavity that can be nanofabricated in various shapes and dimensions. A PMUT’s transduction mechanism is governed by thin-film...

2022年11月9日 · In the PAI system, the AlN PMUT array is used to detect PA signals, and the acousto–mechanical response is designed and optimized at the PMUT’s fundamental resonance. In this work, we focus on...

2024年7月23日 · 氮化铝薄膜具有生物兼容性好、热稳定性高和集成电路工艺 (Complementary metal–oxide–semiconductor, CMOS)兼容等优点，是可植入设备和医用传感应用领域的首选压电材料之一。 氮化铝钪通过稀土元素掺杂改性，其压电常数d31较氮化铝薄膜提升2倍以上。 吴涛团队通过对氮化铝钪溅射工艺的优化，成功地制备出不同浓度的高质量、应力可控的氮化铝钪薄膜。 基于优质氮化铝钪压电薄膜，信息学院特聘教授李昕欣团队与吴涛团队合作开发了多种微加工压 …

in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and...

2024年11月14日 · In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure.

2023年2月2日 · Piezoelectric micromachined ultrasonic transducers, or pMUTs, are microelectromechanical system (MEMS) devices that convert electrical energy to mechanical energy or vice versa through the flexural vibration (or deflection) of a membrane composed of a thin piezoelectric film based on piezoelectric effects [1, 2, 3].

This paper mainly designed an aluminum nitride based piezoelectric micro-machined ultrasonic transducer (AlN PMUT) as a wireless power receiver. AlN PMUT is a stacked layers structure of Si/SiO 2 /Mo/AlN/Al about 4μm/1μm/0.1μm/2μm/1μm in thickness from bottom to up suspended by a cavity measuring in 0.496mm×0.506mm. Fabrication and ...

2023年10月9日 · 总结来说，研究人员报道了一种具有特殊双环结构25%钪掺杂aln膜的pmut，能够实现6 m距离传感，这是迄今为止长距离传感pmut的新记录。 该PMUT的谐振频率为91 kHz，薄膜中心的振幅达到2.87 μm/V，比传统结构高出约四倍。

We have successfully demonstrated highly responsive, curved piezoelectric micromachined ultrasonic transducers (pMUTs) based on a CMOS-compatible fabrication process using AlN (aluminum nitride) as the transduction material.