2016年9月1日 · This paper describes an overview of the state of art in PbZr x Ti 1-x O 3 (PZT)ferroelectric thin films and its applications in Micro Electro Mechanical Systems (MEMS). First, the deposition techniques and then the important properties of PZT films such as surface morphology polarization and ferroelectric properties are reviewed.

Zinc-Zirconium-Titanium oxide (PZT) is a piezoelectric ceramics with high piezoelectric constants often used as sensors and actuators. Our research objective in this area is to develop PZT thin-film micro-sensors and actuators.

2023年1月1日 · A two-step wet etching process of PZT thin film with ultra-low undercut ratio (0.62) is developed. The baseline recipe with a high etch rate, and the selectivity with photoresist is 1.14, and the sidewalls etch into an inclined plane of about 30 degrees.

2007年12月4日 · After a brief historical development, this article discusses technological issues such as growth and processing, electrical and optical properties, piezo, pyro, and ferroelectric properties, degradation, measurements methods, and application of mainly lead-zirconate-titanate (PZT = PbZr 1−x Ti x O 3). The focus on PZT stems from its large ...

In this paper, we introduce fundamental technologies of piezoelectric thin films and their related micro-devices, especially focusing on sputtering deposition of PZT thin films and evaluation methods of their transverse piezoelectric properties.

2023年4月15日 · PZT thin films are one of the most effective materials attractive for MEMs applications. In this research, high-quality PZT thin films were deposited on (111)Pt/Ti/SiO 2 / (100)Si substrates by RF magnetron sputtering from a Pb (Zr 0.52 Ti 0.48)O 3 ceramic target.

MEMS Infinity offers PZT piezoelectric films with characteristics tailored to each application. Based on the PZT thin film that has been mass-produced in our own gyroscope CRM and CMS series, we can handle everything from film deposition to device processing.

2021年11月9日 · Lead zirconate titanate (PZT) thin films stand for a prominent technological brick in the field of microsystems. The recent improvements of their manufacturability combined with excellent piezoelectric properties have enabled their introduction in industrial clean rooms all around the world.

2019年5月13日 · We report on the correlated investigation between macroscopic piezoelectric properties and the microscopic deformation of crystal structures of both epitaxial and polycrystalline Pb (Zr,Ti)O 3...

2024年8月1日 · PZT films, as more suitable piezoelectric and ferroelectric materials for miniaturization and integration, offer advantages such as high piezoelectric coefficients, outstanding ferroelectric properties, and enhanced sensing capabilities.