XP8 QCM is a 300mm tool for high-productivity plasma enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber …

INFICON ALD 传感器将石英晶体微天平（QCM）测量的可重复性、精确性和耐用性带入原子层沉积 (ALD)。 ALD 传感器可承受高达 450ºC 的高温，设计在严苛的 ALD 应用环境中运行。 裸 …

ALD is the most advanced deposition method in the market, making it possible to create ultra-thin films of exceptional material quality, uniformity, and conformality. ALD is among the fastest …

INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can …

2002年4月22日 · The in situ measurements allow the investigation of reaction mechanisms in ALD reaction steps. The QCM signal shows the relative weight of the adsorbed species, while …

INFICON ALD 传感器将石英晶体微天平（QCM）测量的可重复性、精确性和耐用性带入原子层沉积 (ALD)。 炫酷抽屉双传感器设计用于在真空室中需要第二晶体的关键过程。 炫酷抽屉单传 …

2002年8月1日 · An in situ quartz crystal microbalance (QCM) in the reaction zone is used for monitoring the ALD film growth. By modifying a commercially available QCM housing and …

QSense电化学模块能够同时进行具有耗散检测功能的石英晶体微天平和电化学测试（EQCM-D），或是同时实现QCM-D和电化学阻抗谱（EIS）测试 椭偏联用模块 椭偏仪模块 Qsense椭 …

The GEMStar Quantum is the latest generation of Atomic Layer Deposition (ALD) Systems targeting demanding applications requiring more precise control while maintaining a benchtop …

XP8 QCM is a 300mm tool for high-productivity plasma-enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber …