The UHV Quartz Crystal Microbalance (QCM) is designed to measure the film thickness or deposition rate from sources in the UHV process chamber. The in-vacuum QCM is comprised of three main parts: a) the UHV bakeable temperature …

在这些工艺中，我们的关键工具之一是石英晶体微天平 (qcm)，它能够监测沉积速率并确保精确的材料分层。 通过使用INFICON的薄膜计量设备，制造商可以完全控制薄膜沉积过程。

In our research, we focus our work on modified process of atomic layer deposition (ALD) and chemical vapor deposition (CVD) to achieve area-selective deposition (ASD). We have been trying to find a pathway to achieve ASD with the formation of a reversible blocking layer exclusively on the non-growth surface.

INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only ...

Telemark supplies robust single or dual quartz crystal (QCM) sensor heads. The dual crystal head includes a “shutter” for alternate use of crystals or the availability of a fresh crystal in the event of crystal failures.

USING THE COUPLED MICRO-REACTOR/UHV SURFACE ANALYSIS SYSTEM AND THE QCM-BASED VISCOUS FLOW REACTOR TO STUDY AREA-SELECTIVE DEPOSITION A Thesis Presented to the Faculty of the Graduate School of Cornell University In Partial Fulfillment of the Requirements for the Degree of Master of Science by Yen-Hsiung Wang August 2021

Most cost-effective QCM sensor for most deposition monitoring processes; Dual Crystal with Shutter; Standard parallel and right-angle configurations; Up to 400°C bakeout with water cooling; Configurable with no feedthrough or adjustable length with bored-through union fittings between feedthrough and water lines

2005年2月1日 · We describe an apparatus for friction experiments on molecularly thin films carried out with the quartz crystal microbalance technique (QCM) in ultrahigh vacuum (UHV) and at a temperature as...

The electrospray ionization deposition method (ESID) is based on the atomic dispersion of fluid that contains molecules or nano-articles under high electric field onto a substrate. The spray nozzle is connected to a high-voltage power supply while the target substrate is grounded.

INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性，提供超越当前市场上的任何传感器头的最佳热稳定性。 可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成，设计为可承受连续烘烤温度高达 450° C（仅适用于烘烤，实际沉积监控需要水流）。 前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。 Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.