超高真空圆形传样系统（UHV RDC System）是费勉仪器为超高真空复杂系统的样品传递专门设计研发的，可连接多个超高真空腔体（例如：快速进样室，样品生长腔，衬底制备腔，电子结构分析腔等），传样过程中保证超高真空量级的真空增量（1E-10mbar）。

Radial Distribution Chamber (RDC) Super-Flexible Transfer Backbone for UHV Clusters Safe and easy sample handling; Suitable for flag-style sample holders or wafers up to 4" diameter; Individually designed UHV chamber for best use of lab space; Easily configurable regarding pumps and motorisation

The Cluster Transfer System is Vinci Technology’s practical solution for Ultra High Vacuum (UHV) applications, suitable for research facilities looking to streamline their sample processing. Designed with a focus on ease of use and cost-effectiveness, this system features a rotary telescopic transfer arm that facilitates the smooth automated ...

uhv rdc机械臂（见图1）是费勉仪器为超高真空复杂系统的样品传递专门设计研发的。 实现了相互嵌套的三级机械传递臂的依次伸出，实现了机构末端长距离的伸缩运动。

Radial Distribution Sample Transfer System is designed as a sample transfer instrument for UHV system by Fermi Instruments. RDC chamber, a UFO shaped chamber, is made of SS316, UHV compatible. It connect different systems as one piece and samples can travel freely in UHV environment and could be measured in-situ.

RDC（Radial Distribution Center）真空互联系统非常适用于需要互联的工作站数量不多的情况（比如3-5个，最多8个），布局一般是各工作站环绕在RDC的四周，形成一个Cluster原位系统。 RDC作为样品传输的中心枢纽，通过其自带的磁力耦合机械手的旋转及伸缩功能将样品在各工作站之间来回转运。 SSI的RDC真空互联特点： 1）磁力驱动机械手：2维运动（旋转+直线）和3维运动（上下+旋转+直线）可选. 2）驱动方式：手动驱动和伺服电机驱动可选. 3）机械臂伸出距 …

The OmniVac RDC Distribution Chambers are the central element of our multichamber UHV-systems. It provides access to up to 8 individual chambers for e.g. preparation, storage or analysis.

Customized multichamber UHV system (EMIL) for transfer between the silicon thin film deposition cluster, the SISSY@EMIL end‐sta-tion and other analysis tools, load‐lock and storage chambers located along the sample transfer system and the radial distribu-tion chamber.

真空互联总体分成两大类：直线真空互联及rdc互联。 直线真空互联通过直线超高真空管道将多个工作站互联起来组成完整的薄膜制备、表征的原位系统。

Radial Distribution Sample Transfer System is designed as a sample transfer instrument for UHV system by Fermi Instruments. RDC chamber, a UFO shaped chamber, is made of SS316, UHV compatible. It connect different systems as one piece and samples can travel freely in UHV environment and could be measured in-situ.