A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in vacuum systems. When constructed as a quadrupole mass analyzer, there exist two implementations, utilizing either an open ion source (OIS) or a closed ion source (CIS).

残余气体分析 Residual Gas Analysis，简称RGA，也称做内部水汽分析Internal Moisture Analysis ，或者IVA (Internal Vapor Analysis)。 正常的空气成分按体积分数计算是：氮 (N2)约占78%，氧 (O2)约占21%，其它是稀有气体、二氧化碳、水蒸气 (H2O)等。 密封器件内部气氛对密封电子元器件的性能、寿命和可靠性有重要影响。 如果水汽含量过高，或同时还有其它的有害元素，会导致器件失效或性能参数不稳定。 内部气氛中的水汽会加速对电路的腐蚀作用，造成密封腔内部环 …

The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA's provide detailed gas analysis of vacuum systems at about half the price of competitive models.

MIL-STD-883, MIL-STD 750, Method 1018 is considered the best specification for internal water vapor content – also known as Residual Gas Analysis (RGA). The RGA testing method defines procedures for RGA equipment calibration and device testing, as well as the maximum acceptable limits for internal water vapor content.

Interpreting an RGA spectrum is easy! This is not rocket science. The gas remaining in a chamber under vacuum — the residual gas — is analyzed using an RGA. The typical quadrupole RGA spectrum (Figure 1) has a linear mass scale (x-axis) and a log or linear peak height or intensity scale (y-axis) indicating the amount present at that mass.

Residual Gas Analysis Basics . The SRS RGA can perform both qualitative and quantitative analysis of the gases in a vacuum system. Obtaining spectra with the SRS RGA is very simple. Interpreting the spectra, that is understanding what the spectra is trying to tell you about your vacuum system, requires some work.

What is an RGA? A Residual Gas Analyser (RGA) is an instrument for measuring the partial pressures of gas species in a vacuum system. An instrument that measures the mass-to-charge ratio of charged particles. An ion source, which can …

Precise gas analysis with customizable options for differing pressures. Its compact design integrates an Edwards PRA/WRA Residual Gas Analyser and a T-station 85 turbomolecular pumping station. Choose from multiple inlet options for flexibility in connecting to any process.

A residual gas analyzer (RGA) of either magnetic sector or mass filter type is simply a mass spectrometer that analyzes the gas remaining in a vacuum chamber. RGAs are vital for anyone seriously interested in vacuum diagnostics.

2024年12月5日 · A Residual Gas Analyzer (RGA) is a sensitive instrument designed to measure and analyze the gases present in a vacuum system. These gases can range from the residual air left after a vacuum pump removes the majority of air, to other gases generated through chemical reactions, leaks, or outgassing from materials in the system.