The RTP oven is a durable and efficient heat treatment system that features a unique lamp arrangement with upper and lower cross lamp arrays. The process cycles are extremely short …

快速热处理 （RTP）设备是一种单片热处理设备，可以将晶圆的温度快速升至工艺所需温度（200-1300℃），并且能够快速降温，升/降温度速率微20-250℃。 除了能源种类多，退火时间范围 …

2015年3月17日 · CVD Equipment Corporation offers research and production of rapid thermal processing system and rapid thermal annealing system for many processes including solar …

RTP-100-HV-EP (High Vacuum) front loading with 200K/sec ramp up rate. High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 200 K/sec. Read more »

Unitemp’s series of rapid thermal process (RTP) ovens comprise the RTP-100, RTP-150 and RTP-200 models, with extra power and high vacuum versions also available. The RTP-100 is …

公司自主研发的快速退火炉RTP具有国内领先的技术水平，已在Fab厂、研究所、高校等芯片生产单位得到广泛应用。 7X24小时服务响应，确保设备任何问题1小时内有解决办法！ 优秀的研 …

Vacuum RTP oven for wafers and substrates up to 300 mm diameter with ramp up rate up to 40K/s down to 10-6mBar. Compact programmable hotplates for use in all applications. For …

Shop the Solaris 150mm RTP Oven by Surface Science Integration. Precision annealing for silicon wafers, compound semiconductors, oxidation, nitriding, and more.

Rapid Thermal Vacuum Process Oven with auto load/unload. Key features are good temperature uniformity, precise controlled ramp-up rates and fast ramp-down rates, short process …

JTEKT Thermo Systems developed world's first rapid thermal processing equipment with an induction heating system (IH-RTP) in the field of semiconductor manufacturing devices for 300 …