纳米压印技术主要包括 热压印 （HEL），极紫外压印（UV-NIL）（包括进一闪光印（S-FIL））， 微接触印刷。 纳米压印是加工聚合物结构的最常用方法，它采用高分辨率电子束等方法将结构复杂 纳米结构 图案制在印章上，然后用预先图案化印章使聚合物材料变形 ...

2005年2月1日 · In 1999, Willson and Sreenivasan developed step and flash imprint lithography (S-FIL™). The use of a quartz template opens up the potential for optical alignment of the wafer and template. This paper reviews several key aspects of the S-FIL process, including template, tool, ultraviolet (UV)-curable monomer, and pattern transfer.

本文回顾了 S-FIL 工艺的几个关键方面，包括模板、工具、紫外线 (UV) 固化单体和图案转移。 还介绍了两种应用：接触孔和表面声波 (SAW) 滤波器。

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2017年9月25日 · This article discusses the transition of a form of nanoimprint lithography technology, known as Jet and Flash Imprint Lithography (J-FIL), from research to a commercial fabrication infrastructure...

2005年10月28日 · The Step and Flash/spl trade/ Imprint Lithography (S-FIL/spl trade/) process has been developed around a low viscosity, UV curable monomer that allows processing at pressures of < 0.5psi and room temperatures. This leads to a gentle process that has low defectivity and high throughput.

步进和闪光压印光刻（S-FIL，Molecular Imprints, Inc. 的商标）是 NIL 的一种变体，可以在室温和低压下进行。 在 S-FIL 中，低粘度液体压印材料通过暴露在紫外线下而在图案化模板中硬化。

Step and flash imprint lithography, or S-FIL ®, was introduced in 1999 by The University of Texas at Austin (Proc. SPIE-Int. Soc. Opt. Eng., 1999, 3676, 379), and has progressed from an academic curiosity to commercialization in less than five years (J. Microlithogr., Microfabr., Microsyst., 2005, 4, 1).

2008年5月1日 · In this paper, the use of Focused Ion Beam (FIB) milling as an alternative technology to electron-beam lithography in production of complex 3-D-structures such as “Motheye” lenses for Step and Flash Imprint Lithography (S–FIL) templates is discussed.

Sarjana Filsafat (S.Fil) merupakan gelar akademik yang diberikan kepada lulusan pendidikan tinggi tingkat sarjana yang memiliki kualifikasi dan kompetensi ilmu filsafat. Dalam beberapa hal, filsafat juga dapat diartikan sebagai sebuah studi tentang seluruh fenomena kehidupan dan pemikiran manusia secara kritis dan dijabarkan dalam konsep mendasar.