FTIR spectra of SiC films deposited at different deposition …
Silicon carbide (SiC) thin films were deposited using hot wire chemical vapor deposition technique from silane (SiH 4) and methane (CH 4) gas precursors. The effect of deposition pressure on...
SiC Analysis via FT-IR for Research, Development and QC
2021年9月3日 · For SiC material research and development, among other techniques, FT-IR spectroscopy stands out as an easy and effective tool for the investigation of various …
Fourier transform infrared (FTIR) spectroscopy provides important and practical information about chemical bond states of materials. In this paper, SiC nanowires grown by CVD using …
碳化硅外延层厚度及其均匀性的无损检测——红外显微系统_光谱网
2024年2月21日 · 在硅同质/异质外延生产中，红外傅立叶变换光谱技术（ftir）是测试硅外延层厚度一种非常成熟的方法，具有准确、快速、无损等优势，非常适合工业化使用。
Fourier Transform Infrared Spectroscopy of Silicon Carbide …
2016年5月22日 · We provide a comparative Fourier transform infrared spectroscopy investigation of the SiC nanowires grown with various catalyst materials. FTIR provides valuable and …
半导体碳化硅（SIC）同质外延层厚度无损红外反射光谱法的分析 …
碳化硅（SiC）已成为工业电子领域最重要的宽禁带半导体之一，由于其高热导率、高击穿场强、高电子饱和漂移速率等优势，特别是对于大功率半导体器件，碳化硅优于传统硅，更受青睐。
FT-IR spectra of SiC. | Download Scientific Diagram - ResearchGate
FT-IR spectra of SiC. The Silicon Carbide (SiC) nanotubes were prepared using a Mi-crowave oven. The carbothermal reduction of silica with graphite is carried out in a domestic microwave …
Infrared spectroscopy characterization of 3C–SiC ... - IOPscience
2012年11月9日 · In this paper, we present a precise FTIR characterization of 3C–SiC epitaxial layers on a silicon substrate which we have restricted to the transmission FTIR absorption …
FTIR analysis of a-SiC:H films grown by plasma enhanced CVD
2005年2月15日 · In this study, a-SiC:H films grown by PECVD are analyzed by Fourier transform infrared (FTIR) spectroscopy to elucidate the hydrogen content of the films based on the …
Fourier transform infrared spectroscopy (FTIR) spectra of SiC, PVP, …
Download scientific diagram | Fourier transform infrared spectroscopy (FTIR) spectra of SiC, PVP, and PVP-adsorbed SiC. The chemical properties of the PVP-modified SiC were further...