Uniform broad-area deposition and patterning of SiO2 nanofilms …
2024年1月4日 · We report the deposition and patterning of silicon dioxide (SiO 2) films of high electrical and optical quality on Si (100) or polymer substrates in a N 2 atmosphere and at 300 K by the photochemical conversion of thin liquid tetraethoxysilane (TEOS) layers with narrowband vacuum ultraviolet radiation [vacuum ultraviolet (VUV), 172 nm] provided ...
Low Temperature Photochemical Vapor Deposition of SiO2 Using …
2001年7月6日 · In this work, low temperature Xe 2 * excimer lamp photochemical vapor deposition (photo-CVD) of SiO 2 is performed using SiH 4 with three oxidant systems: O 2, H 2 O/O 2, and H 2 O 2.
SiO2 Film Coatings with VUV Excimer Lamp CVD | MRS Online …
2011年2月10日 · Silica film coatings were demonstrated using photo-chemical vapor deposition with a 172-nm Xe excimer lamp. Tetraethoxyorthosilicate (TEOS) molecules were successfully dissociated into SiO 2 +2C 2 H 5 -OH+; (residual C and H) with the 7.2-eV photons.
SiO2/InP Structure Prepared by Direct Photo-Chemical Vapor …
1995年2月1日 · Silicon dioxide ( SiO 2) films have been successfully deposited on indium phosphide (InP) substrate at low temperature and low pressure by direct photo-enhanced chemical vapor deposition (photo-CVD) under irradiation by a deuterium lamp. Silane ( SiH 4) and oxygen ( O 2) are used as reactant sources.
Research of SiO2/InP structure prepared by photo-CVD
The SiO2 film as an insulator in InP MOS structure was grown by mercury-sensitized photo induced chemical-vapor deposition (photo-CVD) utilizing gaseous mixture of monosilane (SiH4) and nitrous oxide (N4O) under 253.7 nm ultraviolet light irradiation.
SiO2 Growth and Annealing by Lamp heating | MRS Online
This paper reports the results of a study of thin SiO 2 growth and annealing in a lamp heater (Heatpulse). Good quality 5–10 mn SiO 2 films on silicon have been obtained. For good oxides the average destructive breakdown-field was 13 MV/cm and very few or …
Formation of Transparent SiO2 Thin Film at Room Temperature …
1997年12月1日 · A transparent SiO 2 thin film was grown with Xe 2* excimer lamp and NF 3, O 2 mixed gases at room temperature. Unlike the conventional methods such as atomic layer epitaxy (ALE) at low temperature, this method requires only a …
SiO2 film coatings with VUV excimer lamp CVD - ResearchGate
2011年1月1日 · Silica film coatings were demonstrated using photo-chemical vapor deposition with a 172-nm Xe excimer lamp. Tetraethoxyorthosilicate (TEOS) molecules were successfully dissociated into...
Plasma-assisted synthesis and photoluminescence properties of …
2025年3月1日 · SiO 2 NWs have unique properties such as optical transparency, resistance to laser damage, and chemical stability, making them suitable hosts for optical dopants. Rare …
Ge nanoparticles in SiO2 for near infrared photodetectors with …
2019年7月16日 · In this paper, we investigate the films formed of Ge-NPs:SiO 2 with high photoresponse for visible (VIS)—NIR detection. In this aim, we study the effect of the deposition temperature on the...