2014年10月31日 · Silicon carbon nitride (SiCN) thin films are used as protective and wear resistant coatings due to their specific physical and mechanical properties such as high …

2013年4月3日 · Interfacial adhesion is critical to the reliability of microelectronic/nanoelectronic devices. The metrology for adhesion characterization plays an important role in enabling …

2019年6月19日 · In this work, the composition of SiCN was varied aiming at the identification of the key elements taking part in the bonding mechanism. The film density, roughness, CMP …

Results are presented of recent studies in material exploration for W2W bonding and advanced W2W alignment carried out as a holistic approach to enable a robust ultra-fine pitch …

2018年7月1日 · The SiCN film with a thickness of 5.0 nm exhibited excellent prevention of moisture diffusion into the device. Furthermore, the step coverage was improved to equivalent …

In this study, we investigated the surface and subsurface of dielectric films (SiCN, SiO 2) at several post-process steps to understand their characteristics. Positron Annihilation …

2020年12月23日 · Silicon carbon nitride (SiCN) compounds have aroused great interest as dielectric materials for direct bonding because of the high thermal stability and high bond …

Silicon carbon nitride (SiCN) compounds have shown great interest as dielectric materials for direct bonding due to the high thermal stability and high bond strength, as well as its Cu …

SiCN is half-Heusler structured and crystallizes in the cubic F-43m space group. The structure is three-dimensional. Si4+ is bonded in a body-centered cubic geometry to four equivalent C2- …

These characteristics of SiCN make it a valuable material for sensing at high temperature and this paper outlines the fabrication of SiCN as thick and thin films which could be eventually used as …