XPS 光谱解读. Ta4f 区域具有明显的自旋轨道分裂峰 (Δ 金属 =1.92 eV)。 钽金属在约33 eV处出现能量损失特征峰，Ta 2 O 5 在约38 eV处出现能量损失特征峰。 钽金属的 Ta4f 区域峰形不对称。 钽化合物（如氧化物）的 Ta4f 峰形对称。

Tantalum oxide is reduced by an argon ion beam to form a continuum of oxidation states e.g. Ta 2 O 5, Ta 3 O 7, Ta 4 O 9, etc. Use lowest beam energy possible for depth profiling or gas cluster ion source to clean (if available).

The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra. Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE. Peak-fits are guides for practical, real-world applications.

Data Collection Settings for Tantalum (Ta) Conductivity: Tantalum readily develops a native oxide that is sensitive to Flood Gun – Differential Charging Possible – float sample recommended; Primary Peak (XPS Signal) used to measure Chemical State Spectra: Ta (4f 7 /2) at 21.8 eV

The TaN bare substrate (red line) XPS spectrum shows peaks at binding energies around 230.4 eV and 242.5 eV, which are distinctive of the 4d 5/2 and 4d 3/2 states of partially oxidized TaN, such...

X-ray photoelectron spectroscopy (XPS or ESCA) curve fitting procedures, reference materials and useful notes are listed here to provide a starting point for the consistent interpretation of XPS spectra. These reference pages contain tips and techniques that are designed to help both the novice and advanced XPS user.

2019年4月15日 · The XPS results demonstrate the existence of Sm 3+ and Sm 2+ ions in SmNbO 4 and SmTaO 4. The Sm 3d 5/2 peak consists of strong features characteristic of Sm 3+ (1083.0 eV) with electron configuration (4f 5) and Sm …

通过观察核心能级光谱、价带光谱和功函数变化，对多晶 Ta 样品上自然形成的天然氧化物的 X 射线光电子能谱 (XPS) 深度剖面研究进行了探测。 本论文解决了沿氧化物层深度存在不同 Ta 低氧化物的问题。 核能级光谱、价带和功函数测量都表明绝缘 Ta2O5 向金属 Ta 的转变，具有 Ta 亚氧化物的渐变分布。 讨论了离子束照射的影响和合成方法中的变化对确定轮廓的影响。 通过使用不同的离子束能量，研究表明离子束引起的效应可以忽略不计。 通过观察核心能级光谱、价带光 …

Interpretation of XPS spectra Ta4f region has well separated spin-orbit components (Δmetal=1.92eV). Loss feature for Ta metal appears at ~33eV and ~38eV for Ta 2 O 5 .

2013年8月22日 · In this report, we demonstrate two separate electrochemical techniques, i.e., cyclic voltammetric and constant-potential electrolyses, for depositing TaO x on glassy carbon. With the utilization of Ar + etching and XPS, the identification of the oxide species constituting the TaO x was accomplished along the depth profile.