1998年8月14日 · Two kinds of tantalum oxide films have been studied by XPS: dry and electrogenerated anodic oxides. XPS spectra of Ta4f and O1s have been used to determine the chemical composition of the different films. Ta 2 O 5 is the main constituent of thick films (15 nm≤ dox ≤60 nm), although the concomitant presence of sub-oxides (mainly TaO) is observed.

1998年9月1日 · XPS analysis (including peak decomposition technique) shows that the layers obtained by thermal oxidation of tantalum films on Si at temperatures 673 and 773 K are stoichiometric Ta 2 O 5 only at the surface of the layers and a change in the chemical composition and the structure in depth of the layers is found.

XPS Spectra Tantalum (Ta) Compounds The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra. Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.

The elemental composition and chemical bonding state in the as-deposited thin film has also been probed by X-ray photoelectron spectroscopy (XPS). The XPS results reveal that the main composition of the as-deposited film is mainly Ta 2 O 5 with some TaO x and a little TaO, the O/Ta ratio is about 2.69 which is a bit higher than the ...

X-ray photoelectron spectroscopy (XPS or ESCA) curve fitting procedures, reference materials and useful notes are listed here to provide a starting point for the consistent interpretation of XPS spectra. These reference pages contain tips and techniques that are designed to help both the novice and advanced XPS user.

通过观察核心能级光谱、价带光谱和功函数变化，对多晶 ta 样品上自然形成的天然氧化物的 x 射线光电子能谱 (xps) 深度剖面研究进行了探测。 本论文解决了沿氧化物层深度存在不同 Ta 低氧化物的问题。

Ta2O5 is an important material that recently has been discovered to serve as an attractive alternative to TiO2 during photocatalytic and photoelectrochemical processing given that the position of...

Novel tantalum (Ta) and chitosan (CS)-doped CuO nanorods (NRs) were synthesized using a single step co-precipitation route. Different concentrations (2 and 4%) of Ta were used in fixed amounts of...

2013年8月22日 · The electrochemically induced nonhydrolytic condensation route is proposed to be capable of producing TaO x with a distribution gradient of Ta2O5, TaO2, and TaO in the depth direction. Through the use of XPS and controlled Ar+ etching, the surface composition and oxide species of tantalum oxides (TaO x ), which were electrodeposited on gl

1998年9月1日 · The effect of nitrogen annealing at 1123 K for 30 min on the structural characteristics of thin (15 nm) thermal Ta 2 O 5 layers on Si was examined by X-ray photoelectron spectroscopy (XPS). The results indicate that the stoichiometric Ta 2 O 5 detected at the surface of as-deposited films is reduced to suboxides at the interface with Si.