Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation, all of which contribute to customers’ productivity.

Tactras™は、2006年の発売以来、高い信頼性と高生産性を提供する300mmウェーハプロセス対応プラズマエッチング装置です。 半導体デバイスの微細化、高密度化を実現するため、デバイス構造が3次元化へと移行し、エッチング加工への要求は年々高まっています。 高まる技術要求に対応すべく、Tactras™はエッチングの用途に応じ、高アスペクト比エッチング、マスク＆絶縁膜エッチング、BEOL 絶縁膜エッチング向けに、それぞれカスタマイズされた仕様を提供しま …

TEL用于功率元器件方向的等离子体反应器（Plasma Reactor）曾在业界获得了最大交货量，而此款“Tactras-UDEMAE”设备系统将 等离子体反应器 的应用范围兼容至300mm，并将其安装在 Tactras 平台上。Tactras是一个高度可靠且高效的平台，已在 300 mm晶圆工艺中得到验证。

Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial.

TEL / TOKYO ELECTRON Tactras Vigus RK4 is an advanced etcher/asher designed to facilitate precise, reliable and speedy electrical etching and ashing processes, equipped with an Auto-Matching System, temperature monitoring unit and a range of safety features for maximum efficiency and safety.

TEL / TOKYO ELECTRON Tactras Vigus RK4 is a high-performance Etcher/Asher designed to conduct liquid and vacuum etching and ashing applications, with a wide range of processes, three chamber design, multiple gas sources and high temperature control.

TEL / TOKYO ELECTRON Tactras Vigus RK4 is a widely used etcher/asher with advanced features, including gas delivery, auto-stabilization, and five-point pressure measurement, providing users the highest level of precision for etching and ashing processes.

TEL/TOKYO ELECTRON Tactras Vigus RK4是一款高性能的Etcher/Asher，设计用于进行液体和真空蚀刻和灰化应用，工艺范围广泛，三室设计，多气源和高温控制。 TEL / TOKYO ELECTRON Tactras Vigus RK4 刻蚀机、去胶机 用于销售价格 #293649558 > 从 CAE 购买

TEL/TOKYO ELECTRON Tactras Vigus RK4是一款先进的蚀刻器/灰化器,旨在促进精确、可靠和快速的电气蚀刻和灰化过程,配备自动匹配系统、温度监测装置和一系列安全功能,以实现最高的效率和安全性。

TEL/TOKYO ELECTRON Tactras Vigus RK4是一种广泛使用的蚀刻器/asher,具有先进的功能,包括气体输送、自动稳定和五点压力测量,为用户提供了蚀刻和研磨工艺的最高精度。