CD-TEM: Characterizing impact of TEM sample preparation on CD metrology ...
2018年4月30日 · Few existing in-line CD metrology techniques can match the sub-surface 3D analytical capability provided by transmission electron microscopy (TEM). Recent developments in sample preparation and analysis have resulted in a fully automated TEM workflow that enables widespread use of TEM for critical dimension metrology ("CD-TEM").
TEM Calibration Methods for Critical Dimension Standards
2007年4月5日 · One of the key challenges in critical dimension (CD) metrology is finding suitable calibration standards. Over the last few years there has been some interest in using features measured with transmission electron microscope (TEM) as …
记忆性CD8 T细胞的分化和异质性_Tmem_Tcm_效应 - 搜狐
2024年11月12日 · 记忆性CD8 T细胞（Tmem）是一群持久存在的细胞，能够在再次遇到抗原时迅速增殖并分化成效应T细胞，从而提供对感染和疾病的长期保护。 效应性和记忆性CD8 T细胞的分化. 在急性感染或疫苗接种后，初始CD8 T细胞被激活，经历强大的克隆扩增，并产生一个多样化的效应性CD8 T细胞（Teff）库。 如果被信号1（抗原）、信号2（共刺激）和信号3（炎症）激活，大多数CD8 T细胞分化成 短寿命效应细胞（SLEC）。 尽管SLEC具有异质性，但它们通常 …
One of the key challenges in critical dimension (CD) metrology is finding suitable calibration standards. Over the last few years there has been some interest in using features measured with the transmission electron microscope (TEM) as
Transmission Electron Microscope Calibration Methods for …
2016年10月13日 · The transmission electron microscope (TEM), which produces lattice-resolved images having scale traceability to the SI (International System of Units) definition of length through an atomic lattice constant, has gained wide usage in different areas of CD calibration.
TEM calibration methods for critical dimension standards
2007年3月1日 · One of the key challenges in critical dimension (CD) metrology is finding suitable calibration standards. Over the last few years there has been some interest in using features measured with the...
Transmission electron microscope calibration methods for critical ...
2016年10月13日 · One of the key challenges in critical dimension (CD) metrology is finding suitable dimensional calibration standards. The transmission electron microscope (TEM), which produces lattice-resolved images having scale traceability to the SI (International System of Units) definition of length through an atomic lattice constant, has gained wide ...
TEM validation of CD AFM image reconstruction - art. no. 651818
2007年3月1日 · Transmission electron microscopy (TEM) was used as the reference metrology system (RMS) with careful attention devoted to both calibration and fiducial marking of...
CD-TEM: Characterizing impact of TEM sample preparation on CD …
2018年4月1日 · TEM-based dimensional metrology (CD-TEM) on advanced semiconductor gate structures is one possible candidate. We have shown TEM-based dimensional metrology provides good...
Scanning and transmission electron microscope based dimensional metrology (CD-STEM and CD-TEM) are candidates to overcome these limitations and extend metrology capabilities into the most advanced technology nodes.