2024年1月12日 · This paper proposes a method of deformation monitoring of foundation pit based on MEMS technology. The algorithm based on time-domain integration is adopted, and a fixed distance test is designed to verify the feasibility of the algorithm.

mems 流量感測器以其靈敏度和輕量化特性而聞名，在精確檢測微小氣流和 測量撲翼產生的不穩定流動場方面具有前所未有的優勢。 此研究亦論及流量 感測器之封裝，並使用 Cadence 軟體進行設計並透過 U18MEMS 製程，將 UMC 0.18μm 和 1P6M 製程整合 MEMS 後處理技術。

2023年9月1日 · Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPS) technology is employed to fabricate the accelerometer structure at MEMSCAP foundry, United State. The characterization of the fabricated device is done at CENSE, IISc, Bangalore.

We study the quenching behavior for a semilinear heat equation arising in models of micro-electro mechanical systems (MEMS). The problem involves a source term with a spatially dependent potential, given by the dielectric permittivity pro le, and quenching corresponds to a touchdown phenomenon. It is well known that quenching does occur.

This paper presents the results of a quaternion-based unscented Kalman filtering for attitude estimation using low cost MEMS sensors. The unscented Kalman filter uses the pitch and roll angles computed from gravity force decomposition as the measurement for the filter.

2017年3月30日 · We study a damped hyperbolic MEMS equation with the fringing field.It arises in the Micro-Electro Mechanical System(MEMS) devices. We give some criteria for global existence and quenching of the solution.First we establish a time-local solution by a …

In this paper, we study an evolution problem arises in the study of MEMS (micro-electro mechanical system) device. We consider both parabolic and hyperbolic type problems. We summarize some recent results on the steady states and …

微波微機電(rf-mems)製程及關鍵技術開發(二) 作品名稱（其他語言） 著者

A capacitive pressure sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The MEMS sensor has a simulated sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg).

微波微機電(rf-mems)製程; 學年 91: 學期 1: 出版（發表）日期 2003-01-01