X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique that measures the very topmost 50-60 atoms, 0.01 um, 5-10 nm of any surface. It belongs to the family of photoemission spectroscopies in which electron population spectra are obtained by irradiating a material with a beam of X-rays.

X-ray photoelectron spectroscopy (XPS), also known as electron spectroscopy for chemical analysis (ESCA), is a technique for analyzing a material’s surface chemistry. XPS can measure elemental composition as well as the chemical and electronic state of the atoms within a material.

This first guide outlines steps appropriate for determining whether XPS is capable of obtaining the desired information, identifies issues relevant to planning, conducting and reporting an XPS measurement, and identifies sources of practical information for conducting XPS measurements.

2020年7月8日 · X-ray photoelectron spectroscopy (XPS) is widely used to identify chemical species at a surface through the observation of peak positions and peak shapes.

1954年研制成世界上第一台双聚焦磁场式 光电子能谱仪。 XPS是一种对固体表面进行定性、定量分析和结构鉴定的实用性很强的表面分析方法。 现今世界上关于XPS的刊物主要有：Journal of Electron Spectroscopy. Related Phenomena. 企业包括：PHI公司，VG公司，Karatos 公司. 发展方向：单色化，小面积，成像XPS 二功能与特点 （1）定性分析--根据测得的光电子动能可以确定表面存在哪些元素， a. 能够分析出了氢，氦以外的所有元素，灵敏度约0.1at%。 空间分辨率 …

2023年10月23日 · 本文介绍了XPS（X射线光电子spectroscopy）的基本概念、工作原理、深度分析、谱图类型、能级分裂以及它在元素定性与定量分析、固体表面和化合物结构研究中的应用。 还讨论了XPS的局限性和分析软件的选择。 1、XPS是什么鬼? 通过收集在入射X光作用下，从材料表面激发的电子能量、角度、强度等信息对材料表面进行定性、定量和结构鉴定的表面分析方法。 一般以Al、Mg作为X射线的激发源，俗称靶材。 2、XPS测试深度是多少? 由于电子穿过材料需 …

2025年2月7日 · XPS, 全称为X-ray Photoelectron Spectroscopy（X射线光电子能谱）, 是一种使用电子谱仪测量X-射线光子辐照时样品表面所发射出的光电子和 俄歇电子 能量分布的方法。XPS可用于定性分析以及半定量分析, 一般从XPS图谱的峰位和峰形获得样品表面元素成分、化学态和分子结构等信息，从峰强可获得样品表面元素含量或浓度。 一般有以下几个方面的应用： 1、元素组成分析对于未知样品，首先进行全谱扫描，初步判断样品表面的元素组成；然后根据全谱扫描 …

2022年8月22日 · How XPS works. X-rays (photons) are shot onto a sample, and when electrons in the sample absorb enough energy, they are ejected from the sample with a certain kinetic energy. The energy of those ejected electrons is analyzed by a detector and a plot of these energies and relative numbers of electrons is produced.

2020年2月3日 · XPS is a surface analysis technique with multiple applications, and is widely used across numerous industries. Also referred to as electron spectroscopy for chemical analysis (ESCA), XPS analysis is suitable for a broad range of materials, including surface coatings and thin films, and can provide valuable information about the elemental and ...

XPS has become the most widely used surface-analysis tool because all elements, with the exceptions of hydrogen and helium, can be identified on sample surfaces from the binding energies of photoelectrons emitted during X-ray excitation.