
Gate Reliability of p-GaN HEMT With Gate Metal Retraction
Abstract: In this article, we present an analysis of the gate degradation induced by long-term forward gate stress in GaN-based power HEMTs with p-type gate, controlled by a Schottky metal-retracted/p-GaN junction. In particular, time-dependent gate breakdown and threshold voltage instability are investigated as function of different geometries ...
Improvement Performance of p-GaN Gate High-Electron-Mobility …
2024年4月12日 · This study demonstrates a particular composited barrier structure of high-electron-mobility transistors (HEMTs) with an enhancement mode composed of p-GaN/GaN/AlN/AlGaN/GaN. The purpose of the composite barrier structure device is to increase the maximum drain current, reduce gate leakage, and achieve lower on …
Role of the AlGaN barrier on the long-term gate reliability of …
2020年11月1日 · Devices feature the gate metal retraction (GMR) process step, which consists in removing ~130 nm of TiN gate metal interlayer from the edges of the gate in order to avoid the breakage at the gate sidewalls [20, 21]. The access regions were passivated by a dielectric stack containing Al 2 O 3 and SiO 2.
Review of technology for normally-off HEMTs with p-GaN gate
2018年5月1日 · For the selective etch of the p-GaN, low power Cl 2-based processes, at a low etch rate, are indicated to define the p-GaN gate region, without significant alteration of the surface morphology and 2DEG properties in the access regions. One of the most critical parts of the device is the p-GaN layer and its gate electrode.
具有栅极金属回缩功能的 p-GaN HEMT 的栅极可靠性,IEEE …
在本文中,我们分析了由肖特基金属缩回/p-GaN 结控制的 p 型栅极基功率 HEMT 中长期正向栅极应力引起的栅极退化。 特别是,随时间变化的栅极击穿和阈值电压不稳定性作为不同几何形状、栅极偏置和温度的函数进行研究。
微电子所在新结构p-GaN栅极HEMT器件和电路级可靠性研究方面 …
2024年7月5日 · 戴心玥博士创新提出了一种具有欧姆岛镶嵌的p-GaN栅(Island Ohmic p-GaN gate, 简称IO-PGaN)增强型AlGaN/GaN HEMT器件结构,成功实现了稳定的阈值电压和较大的栅极摆幅。
Gate Reliability of p-GaN HEMT With Gate Metal Retraction,IEEE ...
In this article, we present an analysis of the gate degradation induced by long-term forward gate stress in GaN-based power HEMTs with p-type gate, controlled by a Schottky metal-retracted/p-GaN junction.
Gate Conduction Mechanisms and Lifetime Modeling of p …
2018年11月6日 · Abstract: The gate conduction mechanisms in p-gallium nitride (GaN)/AlGaN/GaN enhancement mode transistors are investigated using temperature-dependent dc gate current measurements. In each of the different gate voltage regions, a physical model is proposed and compared to experiment.
P-GaN栅结构GaN基HEMT器件研究进展 - Beijing University of ...
增强型氮化镓(GaN)基高电子迁移率晶体管(high electron mobility transistor,HEMT)是高频高功率器件与开关器件领域的研究热点,P-GaN栅技术因具备制备工艺简单、可控且工艺重复性好等优势而成为目前最常用且唯一实现商用的GaN基增强型器件制备方法。
Gate Reliability of p-GaN Power HEMTs Under Pulsed Stress …
2022年3月1日 · However, biasing GMR p-GaN HEMT at VG > 8 V and T > 80 °C, a new degradation mechanism shows up, possibly altering the lifetime even at low VG operation.
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