HSQ thin film XPS spectra and MIM device schematic. (a) Normalised XPS ...
Photoelectron Spectroscopy (XPS) scans on two spin-coated HSQ thin films on Si substrates to demonstrate the effect of thermal annealing. The XPS spectra High Performance Resistance...
Nanometer-scale fabrication of hydrogen silsesquioxane (HSQ
A nanometer-scale grating structure with a 60-nm-wide gap and 200-nm-wide ridge has been successfully demonstrated on a silicon-on-insulator substrate by using a 220-nm-thick …
Nanoporous Silica Films Derived from Structural Controllable Poly ...
2003年10月1日 · In this study, nanoporous silica films were prepared from the poly (hydrogen silsesquioxane) (HSSQ) and a templating agent. Three different kinds of the HSSQ with …
氢倍半硅氧烷双层光刻胶——结合高分辨率电子束光刻和温和的光 …
氢倍半硅氧烷 (HSQ) 是用于高分辨率电子束光刻的主要抗蚀剂之一。 例如，在超薄 HSQ 中报告了间距为 12 nm 的线条和空间。 然而，为了在功能器件中利用这种 HSQ 能力，光刻胶中定义 …
Hydrogen silsesquioxane - Wikipedia
Hydrogen silsesquioxane (s) (HSQ, H-SiOx, THn, H-resin) are inorganic compounds with the empirical formula [HSiO 3/2] n.
In this study, nanoporous silica films were prepared from the poly(hydrogen silsesquioxane)(HSSQ) and a templating agent. Three different kinds of the HSSQ with …
通过表面化学改性提高氢倍半硅氧烷 (HSQ) 在用于电子束光刻的各 …
氢倍半硅氧烷 (HSQ) 是一种用于电子束光刻和亚 5 纳米半间距图案的出色负性抗蚀剂，可以使用高对比度显影工艺实现。 然而，HSQ在不同类型基板上的附着质量各不相同，从而限制 …
XPS 元素表 | 赛默飞 | Thermo Fisher Scientific - CN
xps 元素参照表 用于 XPS 的 Thermo Scientific™Avantage™ 数据系统的一个重要特征是拥有庞大的知识库，能提供 XPS 分析和元素表征相关的信息。 此处按元素周期表排列，给出了知识基 …
Spectroscopic and Microscopic Analysis of Humic Acid Isolated …
2023年4月19日 · The spectroscopic analysis of isolated humic acid through scanning electron microscopy (SEM), energy-dispersive X-ray (EDX), X-ray photoelectron spectroscopy (XPS), …
HSQ-光刻胶/SOG-北京汇德信科技有限公司
HSQ (Hydrogen Silsesquioxane Polymers) 是⼀种半导体级纯度的氢倍半硅氧烷聚合物。 作为半导体⾏业的⼀种重要材料应⽤于超⾼分辨EUV光刻、电⼦束光刻，以及作为旋涂玻璃 …