Product Spotlight: AG Heatpulse 8800 / 8108 RTP - Plasma-Therm
What is the AG Heatpulse 8800/8108 RTP? The AG Heatpulse RPT is a low-cost Rapid Thermal Processing solution for advanced processing of substrates up to 200mm. It is suitable for …
AG 8108 快速退火炉-上海芯立电子科技有限公司
半导体设备的制造需要高精度的技术支持，包括晶圆加工和精密电路设计等，能够实现亚微米级别的加工工艺。 高稳定性。 半导体设备的稳定性要求非常高，只有达到高稳定性，才能保证制 …
Heatpulse™ RTP System - Plasma-Therm
AG Heatpulse Legacy Systems. We support the legacy AG Heatpulse 8108 and 8800 systems with spare parts, field service, and upgrades. The Cortex® control system provides a stable, …
制造商：AG Associate 型号：AG Associate Heatpulse 8108 设备 …
设备型号: AG Heatpulse 8108. 传片方式： Automatic Single wafer. 设备状态: Complete Fully Refurbished. 衬底材料：Si/SiC/GaAs/InP. 材料尺寸：5/6/8inch 圆片. 测温方式：热电偶（200 …
Rapid Thermal Process RTP/RTA 快速升降溫退火爐 - ㄧ 鳴 ...
The Heatpulse® 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambient. The system is built for the production …
AG Associates Heatpulse 8108 Rapid Thermal Processing …
The AG Associates Heatpulse 8108 system includes a 3-1/2-inch floppy disk drive for process recipe storage. A three-axis industrial robot automates processing by transporting wafers into …
AG Associates Heatpulse 8108 Operating Specifications
The following are the operating specifications for the AG Associates Heatpulse 8108 Rapid Thermal Processor. • Wafer handling: automatic serial processing, using standard cassettes. • …
The 8108 system includes a 3-1/2-inch floppy disk drive for process recipe storage. A three-axis industrial robot (Equipe ATM-105 with ESC-100 or equivalent) automates processing by …
AG Associate Heatpulse 8108-南京邦禾仪器仪表有限公司
设备型号：AGAssociateHeatpulse8108 设备状态：Refurbished 工艺温度范围：200-1250℃ 传片方式：自动传片 基地尺寸：4、6、8inch南京邦禾仪器仪表有限公司
2016年10月19日 · MOS clean/MOS compatible wafers cleaned in boats marked "8108" only allowed in the tool. Use clean green nitrile gloves when transferring MOS cleaned wafers from …
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