Adlyte: state of art EUV (Extreme Ultra Violet) light source for metrology and lithography applications. Adlyte provides the semiconductor industry with high brightness extreme …

Adlyte provides high brightness EUV (Extreme Ultra Violet) light sources for metrology and lithography applications. Companies developing EUV tools can depend on the reliability and …

Adlyte is a pioneering company that designs and manufactures EUV light sources. Our innovative technology delivers a high brightness solution for the semiconductor industry. We generate …

Adlyte has been developing a droplet based laser produced plasma (LPP) light over the last decade, specifically focused on the needs of actinic mask inspection for AIMS, Blank and …

Droplet dispenser with >30 μm tin droplet generation for hours of operation. Droplet tracking system with laser triggering on individual droplets enables droplet-laser alignment within <10% …

Adlyte AG, a Swiss Company, has been developing unique Laser Produced Plasma light source technology over last 10+ years for use in semiconductor production Very high brightness …

EUV radiation measurements and results. Adlyte Ltd. Products: Debris mitigation results from HPS. 64 members of staff including PhD students, post-docs, Msc students, Electrical …

Adlyte provides high brightness EUV (Extreme Ultra Violet) light sources for metrology and lithography applications. Companies developing EUV tools can depend on the reliability and …

2012年11月16日 · One of three laser-produced plasma (LPP) EUV light source suppliers in the world, Adlyte is the only one focused on developing light sources for photomask and wafer …

Adlyte’s light source for APMI –Key nominal numbers § Nd:YAGlaser: average power of 1.6 kW, λ= 1.064 μm,10-20 kHz rep. rate, typically Irradiance= 80 -200 GW/cm2 § In-house droplet …