电容微机械超声换能器（CUMT） - 知乎专栏
CMUT 属于 静电转换型超声传感器，它采用 微机械技术 和 电容式传感原理，能够实现高精度、高灵敏度的超声波检测和测量。 CMUT的基本结构是由一个振动薄膜和一个固定电极组成的平行 …
综述：生物医学应用的PMUT和CMUT器件 - 电子工程专辑 EE ...
Jul 10, 2024 · 另一方面，电容式微机械超声传感器（CMUT）和压电式微机械超声换能器（PMUT）是这一领域的两种主要技术，能够克服块体型超声换能器在工作频率和与生物组织 …
Capacitive micromachined ultrasonic transducers
CMUT transducers are MEMS based structures that can be used to transmit and receive acoustic signals in the ultrasonic range. They enable breakthrough applications for ultrasound …
Capacitive micromachined ultrasonic transducer - Wikipedia
Capacitive micromachined ultrasonic transducers (CMUT) are a relatively new concept in the field of ultrasonic transducers. Most of the commercial ultrasonic transducers today are based on …
MEMS压电超声换能器CMUT&PMUT以及生产工艺-电子工程专辑
Jul 7, 2023 · CMUT 换能器是由多层结构和多层材料构成。CMUT 电容单元结构如图 2 所示，从上到下依次为金属铝上电极 氧化硅电气隔离层、绝缘体上硅 (silicon on insulator，SOI)晶 圆顶 …
MEMS | 推动超声设备微型化革命 - 知乎 - 知乎专栏
CMUT属于静电转换型超声传感器，是由一个振动薄膜和一个固定电极组成的 平行板电容器。 其中一块板——振膜（前面提到的微机械薄膜）由硅或氮化硅制成，带有金属电极。 另一块 …
PMUT and CMUT Devices for Biomedical Applications: A Review
Jan 30, 2024 · Abstract: Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in …
Capacitive micromachined ultrasound transducers for intravascular ...
Aug 24, 2020 · The CMUT has successfully achieved the measurement of sound speed, flow rate, viscosity, and acoustic impedance in the fluid environment, which provides a prototype as a …
cMUT technology developments - ScienceDirect
Aug 1, 2023 · Capacitive micromachined ultrasonic transducer (cMUT) technology has steadily advanced since its advent in the mid-1990’s. Though cMUTs have not supplanted …
微机械超声换能器（CMUT和PMUT）关键技术与典型应用
微机械超声换能器（MUT）是指采用MEMS技术制作的超声换能器，根据工作原理主要分为两大类：电容式微机械超声换能器（CMUT）和压电式微机械超声换能器（PMUT），PMUT …
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