CMUT transducers are MEMS based structures that can be used to transmit and receive acoustic signals in the ultrasonic range. They enable breakthrough applications for ultrasound technology in a diverse range of industries such as medical, microscopy, inkjet printin and …

In this work, we demonstrate a CMUT chemical sensor chip with integrated temperature and pressure sensors. These sensors allow the measurement of multiple environmental parameters using a single chip and allow the influence of temperature and pressure on the chemical sensors to be corrected for.

Capacitive micromachined ultrasound transducers (CMUTs) are micro-electromechanical systems that convert electrical energy into sound waves. This new method of generating ultrasound has seen major developments over the last decade and is now widely available for use.

2012年3月1日 · Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity.

2023年8月1日 · The promise of cMUTs—for lower-cost, 3D imaging devices with on-chip electronics—has begun to be realized, through recently-released commercial probes and their expanding use. cMUT technology has begun to carve out its place in the clinical ultrasound transducer landscape, and its impact will be increasingly felt for years to come.

Capacitive micromachined ultrasonic transducers (CMUT) are miniaturised sensor structures whose electrostatic operating principle enables the transmission and detection of ultrasonic waves.

Capacitive micromachined ultrasonic transducers (CMUT) are a relatively new concept in the field of ultrasonic transducers. Most of the commercial ultrasonic transducers today are based on piezoelectricity .

In this paper, we demonstrate a CMUT-in-CMOS approach that produces ultrasonic transducers and circuits on a single chip using a standard foundry CMOS process, augmented only with two blanket post-process steps for sacrificial etching and cavity sealing. 2D arrays as large as 16 times 16, with integrated on-chip buffers, switches and ...

Capacitive micromachined ultrasonic transducers (CMUTs) address these market requirements for the next generation ultrasound systems based on MEMS structures utilized to generate and sense acoustic signals in the ultrasonic range. Based on their unique properties, CMUTs pave the way for innovations in a variety of application areas (see next page).

Abstract: One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach maximizes transducer sensitivity by minimizing parasitic capacitances and ultimately improves the signal to noise ratio.