In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs.

We report experimental results from a comparative study on collapsed region and conventional region operation of capacitive micromachined ultrasonic transducers (CMUTs) fabricated with a wafer bonding technique. Using ultrasonic pulse-echo and pitch-catch measurements, we characterized single elements of 1-D CMUT arrays operating in oil.

Capacitive micromachined ultrasonic transducers (CMUTs) have long been studied. Past research has shown that CMUTs indeed have remarkable features such as wide bandwidth and high efficiency. This paper introduces an inclusion to the CMUT technology

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, ...

In this paper, we present the calculation and measurement of coupling coefficient for ca- pacitive micromachined ultrasonic transducers (CMUTs). The finite element method (FEM) is used for our calcu- lations, and the FEM results are compared with the ana- lytical results obtained with parallel plate approximation.

2012年3月1日 · This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane.

Both CMUT and PMUT are promising new technologies for US medical imaging (1MHz-40MHz) –PMUT better in lower frequency range • Products in < 1MHz range (gesture detection, fingerprint sensor,..)

CMUT 属于 静电转换型超声传感器，它采用 微机械技术 和 电容式传感原理，能够实现高精度、高灵敏度的超声波检测和测量。 CMUT的基本结构是由一个振动薄膜和一个固定电极组成的平行板电容器，当超声波作用于振动薄膜时，会改变电容器的电容值，从而产生电信号。 如下图所示，激发超声时，在传感器电极之间施加直流电压偏置及交流电压，电场使振膜振动产生超声；接收超声时，振膜振动引起电容量变化，产生交流信号。 与 PMUT 相比，同尺寸 CMUT加工难度小，带 …

2003年5月7日 · The FEM calculations of the CMUT indicate that the electromechanical coupling coefficient is independent of any series capacitance that may exist in the structure. The series capacitance, however, alters the collapse voltage of the membrane.

2024年12月1日 · Widespread use of capacitive micromachined ultrasound transducers (CMUTs) has motivated the development of a variety of methods for their fabrication and modeling.