This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodi

Micromachined Ultrasonic Transduc-ers (CMUTs) have emerged as an alternative to piezoelectric transducers, offering advantages such as wide bandwidth, ease of fabricating large arrays, …

2022年1月8日 · Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT …

Capacitive Micro-machined Ultrasonic Transducers (CMUT) enable smaller form factors, larger arrays, larger bandwidths, and integration with driver circuitry for

The CMUT mask for the metal layer following the via etching, which connected the CMUTs to the electronics, masked the entire via location with ~25% additional coverage to prevent …

In this paper, a sacrificial etching-based fabrication process for implementing a 16x16-element 2D CMUT array on a glass substrate with through-glass-interconnects is described in detail. …

2019年7月11日 · A novel multiple hard-mask process flow has been developed to enable fabrication of CMUTs with different cavity and trench heights on the same wafer. These …

2024年7月10日 · 据麦姆斯咨询报道，近期，由意大利帕维亚大学（University of Pavia）和荷兰代尔夫特理工大学（TU Delft）的研究人员组成的团队在 IEEE Access 期刊上发表了以“PMUT …

Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The …

During layout of the mask for micromachining the cMUT layer, either the hexagonal pattern or the alignment key is rotated until an axis of symmetry of the hexagonal pattern is aligned with an...