2024年11月27日 · We report the design, the fabrication and the test of a multi-channel gas sensor based on Capacitive Micro-machined Ultrasonic Transducers (CMUT) functionalized with peptides as sensing material, dedicated to volatile organic compound (VOC) measurements in ambient air.

The micromachining technology has attracted MEMS researchers to test the capabilities of CMUT devices to be introduced in various ultrasonic applications. This research presents design characterization and simulations of three cell geometries: square, hexagonal, and circular, to highlight factors influential for CMUT operation.

2012年3月1日 · Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity.

Frequency [MHz] Frequency [MHz] CMUT requires a dedicated window, optimized for its application. FEM - optimization on attenuation, impedance and mechanical properties

In order to benchmark the MEMS ultrasonic transducers, a set of standard test devices have been defined. Furthermore, common test protocols have been specified and all CMUT and PMUT test structures were characterized using the same air-coupled …

Capacitive micromachined ultrasonic transducer (cMUT) arrays provide broad bandwidth, high sensitivity, low mechanical impedance, and potential for electronic integration, and thus are promising for medical imaging applications.

In this paper, we present the first designs and prototypes of an 8-element, concentric-ring, CMUT array to treat upper abdominal cancers. This array was simulated and designed to focus 30–50 mm into tissue and ablate a 2–3 cm diameter tumor within 1 hour.

2016年10月9日 · We have investigated a Au-In flip-chip bonding process to connect the 2D CMUT array to a custom integrated circuit (IC) with transmit and receive electronics. To develop this process, we fabricated fanout structures on silicon, and flip-chip bonded these test dies to a flat surface coated with gold.

This study aims to simulate and test the performance of a transmitting and receiving capacitive micro-machined ultrasonic transducer (CMUT). Aimed at detecting demand of the CMUT, a matched integrated adjustment circuit was designed through analyzing processing methods of transducer’s weak echo signal.

2020年8月24日 · The CMUT has successfully achieved the measurement of sound speed, flow rate, viscosity, and acoustic impedance in the fluid environment, which provides a prototype as a portable IVUS assistant...