EDX spectroscopy measured for the formed (A) NiSi film and (B) PtSi film. This communication describes the development of optimized metallic contacts on Si for thermoelectric applications. …

2025年3月1日 · In this study, the redistribution of platinum (Pt) during the agglomeration of Ni (Pt)Si is investigated using scanning transmission electron microscopy with energy-dispersive …

2020年9月15日 · The advantages of the as-prepared Si/NiSi 2 /C composite, such as high conductivity of carbon and NiSi 2, porous structure, good dispersion of Si, lead to excellent …

2023年4月18日 · The formation of NiSi 2 $\left(\text{NiSi}\right)_{2}$ is proven by highly resolved (scanning) transmission electron microscopy ((S)TEM) coupled with energy-dispersive X-ray …

EDX spectrum of the Ni2Si structure near the interface with the SiC layer. The micro-structural analysis of Ti/Ni bilayer as Ohmic contacts to n-type 4H-SiC is reported. There was no carbon...

2010年3月1日 · The stability of nickel-based silicides integrated in CMOS circuits has been studied. The evolution of transistor electrical failures is then reported, linked to Ni abnormal …

Nickel monosilicide (NiSi) has emerged as an excellent material of choice for source-drain contact applications below 45 nm node complementary metal-oxide-semiconductor (CMOS) …

EDX results presented in the text are mean values of measurements of at least 3 particles. The solubility of Si in Ni and Si in Co are about 15.8 at.% and 18.4 at.% at the eutectic temperature ...

2007年7月7日 · In order to obtain a thermally stable Ni-FUSI gate electrode, we developed a unique integration process to achieve NiSi phase stabilize at temperature 900 °C and delay …

2006年12月21日 · Porous composite particles having homogeneously distributed intraparticle pores with the size distribution peaked at and a porosity of have been synthesized by a novel …