EUV Lithography: Bakshi, Vivek: 9780470471555: Amazon.com: Books
2008年12月15日 · EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's …
EUV Lithography, Second Edition 2nd Edition - amazon.com
2018年2月7日 · This book covers the fundamental and latest status of all aspects of EUVL in field. It thoroughly covers the current in-field version of EUVL plus related topics, including light …
- 4/5(7)
EUV Lithography, Second Edition
Extreme ultraviolet lithography (EUVL) is the principal lithography technology—beyond the current 193-nm-based optical lithography—aiming to manufacture computer chips, and recent …
EUV Lithography - SPIE Digital Library
The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of …
EUV Lithography, Second Edition | (2018) | Bakshi - SPIE
Extreme ultraviolet lithography (EUVL) is the principal lithography technology—beyond the current 193-nm-based optical lithography—aiming to manufacture computer chips, and recent …
EUV Sources for Lithography - SPIE Digital Library
Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on …
Publications - EUV Litho, Inc.
2012年12月6日 · Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, …
Optical and EUV Lithography: A Modeling Perspective
2021年3月2日 · With his stimulating modern textbook, Optical and EUV Lithography: A Modeling Perspective, Andreas Erdmann provides a handbook that aids anyone interacting with …
- 5/5(1)
EUV lithography - SPIE Digital Library
The SPIE Digital Library offers extensive research on extreme ultraviolet (EUV) lithography, a key technology for advanced semiconductor manufacturing. The content covers fundamental …
EUV Lithography - 豆瓣读书
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading …