A global leader in the production of at-wavelength extreme ultraviolet (EUV) metrology tools, EUV Tech supplies the semiconductor manufacturing industry with leading-edge metrology …

At EUV Tech, we enable the frontiers of semiconductor manufacturing and material science through the development of world leading EUV and soft x-ray instrumentation and techniques.

Accelerating the future of EUV metrology solutions | At EUV Tech, we enable the frontiers of semiconductor manufacturing and material science through the development of world-leading …

The multi-use EUV N&K and Phase Measurement Tool is designed for direct actinic measurement of the optical properties of materials in the Extreme Ultraviolet (EUV) regime.

EUV TECH OVERVIEW 2 • Started in 1997, EUV Tech has pioneered the development of EUV metrology tools: • EUV Reflectometer o Measures the reflectivity and uniformity of multilayer …

Patrick Naulleau 博士，现任美国EUV Tech CEO。 Patrick 于1997年加入美国劳伦斯伯克利国家实验室，并于2010年担任X射线光学研究中心（Center for X-Ray Optics (CXRO) ）主任，主 …

Manufacturer of metrology equipment intended to provide metrology tools using extreme ultraviolet light technology.

2023年5月11日 · EUV Tech, a global leader in the production of at-wavelength EUV metrology tools, is excited to announce the release of the new EUV N&K and Phase Measurement

这些自主研发的 euv光刻机 据称采用了**激光诱导放电等离子体（ldp）**技术，与asml的**激光产生等离子体（lpp）**技术略有不同。中国自主研发的euv光刻机的实际大规模生产可能会 …

EUV Tech is the leading global provider of at-wavelength EUV metrology equipment. Manufacturers use EUV Tech tools to pack as many transistors as efficiently possible onto …