EVG is the market-leading supplier of nanoimprint lithography (NIL) equipment and integration processes. EVG pioneered and mastered NIL from a research approach more than 15 years ago, to implementation in volume production on various substrate sizes from 2 inch compound semiconductor wafers to 300 mm wafers and even on large-area panels.

The versatile EVG ® 7300 UV Nanoimprint Lithography System can support multiple related UV processes: SmartNIL, Wafer Level Optics (WLO) and Stacking – three capabilities merged in one flexible tool. It is a standalone system based on the modularized and improved SmartNIL module, which can be configured depending on handling and automation ...

The HERCULES NIL 200mm is the industry for nanoimprint lithography in high volume manufacturing. Based on a modular platform, the HERCULES NIL combines EVG’s proprietary SmartNIL imprinting technology with cleaning, resist coating and baking pre-processing steps.

EVG offers solutions within the three main areas of Nanoimprint Lithography (NIL): Hot Embossing (HE), UV-based Nanoimprint Lithography (UV-NIL) and Micro Contact Printing (μ-CP).

evg 610 （ nil ）是一款基于 evg610 光刻机的紫外纳米压印设备，可针对压印、光刻、对准功能进行快速转换。 主要特点及参数： · 最大支持 6 英寸（ 150mm ）晶圆

2025年3月5日 · evg的 nil解决方案 能够产生多种不同尺寸和形状的图案，分辨率低至20nm。还提供了各种不同的键合选项，从先进的室温键合技术到等离子体激活键合，以及高质量的气密密封和真空封装。 紫外光刻. uv纳米压印光刻（uv-nil） 热压花

EV Group （EVG）是用于半导体，MEMS，化合物半导体，功率器件和纳米技术器件制造的大批量生产设备和工艺解决方案的领先供应商。 EVG是先进封装和纳米技术的 晶圆级键合 和 光刻技术 的公认市场和技术领导者，EVG的主要产品包括晶圆键合，薄晶圆加工和光刻/ 纳米压印光刻 （NIL）设备，光刻胶涂布机以及清洁和检查/计量系统。 EVG就致力于为其全球研发和生产客户及合作伙伴群提供卓越的工艺专业知识直到客户现场的最终集成。 EVG在光刻技术方面的关键 …

4 天之前 · 此次合作将利用 EVG 的纳米压印光刻 (NIL) 技术、专业知识和服务以及 Teramount 的 PhotonicPlug 技术。 突破性的晶圆级光学技术有助于解决将多条光纤连接到数据通信和电信应用的硅芯片的关键挑战。

EVG's SmartNIL is a full-field imprint technology based on UV exposure, providing a powerful next-generation lithography technique with almost unlimited structure size and geometry capabilities. Since SmartNIL incorporates multiple-use soft stamp processing, it also enables unmatched throughput with considerable cost-of-ownership advantages ...

Pioneering this non-conventional lithography technique for many years, EVG mastered NIL and has implemented it in volume production on ever-increasing substrate sizes. EVG’s proprietary SmartNIL technology is optimized by years of research, development and field experience to address nanopatterning requirements that cannot be supported by ...