
PGV Person Guided Vehicle - IDC Multi-Disciplinary Innovative …
IDC's 300mm Single SD (Static Docking) Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual intrabay transfer of 300mm FOUPs between stockers and process tools within a bay. It is an ergonomically correct device that allows operators to safely handle 300mm FOUPs that typically weigh up to 8 Kg each.
IDC’s 300mm “single” Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual intrabay transfer of 300mm FOUPs between stockers and process tools within a bay. It is an ergonomically correct device that allows operators to safely handle 300mm FOUPs that typically weigh up to 8 Kg each.
PANEL FOUP | Wafer Cases | Semiconductors & Electronic …
PANEL FOUP can transport large size panels securely. Conforms to SEMI Standard. Mechanical interfaces with load port , Manual open / close. Humidity control. Main parts of FOUP: Metal. Please feel free to contact us if you have any inquiries regarding our products. This page provides information on Shin-Etsu Polymer Co., Ltd's PANEL FOUP.
ShinEtsu PLP PGV(日本信越化学 PLP FOUP 搬送推车)
锐硕代理的日本信越化学(ShinEtsu Polymer) PLP PGV(搬送推车),已在国内外板级封装大厂有多例实绩。 此 PGV 用于 PLP 领域的 FOUP 搬送,可搬送满载的 PLP FOUP(70KG),并配备有马达升降,协助现场操作员轻松搬送 PLP FOUP。
600mm x 600mm Panel FOUP PGV - 億尚
PGV (Person Guided Vehicle)是透過高精密可控馬達驅動滾珠螺桿操作升降動作進行取放符合SEMI規範晶圓盒,人員透過操作按鈕控制動作進行,將符合SEMI規範 (E181.3 & E181.4) 的晶圓盒移載至Load port端的承接口
19M035 - 億尚
PGV (Person Guided Vehicle)是透過高精密可控馬達驅動滾珠螺桿操作升降動作進行取放符合SEMI規範晶圓盒,人員透過操作按鈕控制動作進行,將符合SEMI規範 (E181.1 & E181.2) 的晶圓盒移載至Load port端的承接口
FOUP 300EX - Shin-Etsu Polymer America, Inc.
Robust design featuring in automated material handling system operating 8kg payload with overhead transport (OHT), automated-guided vehicle (AGV), person-guided vehicle (PGV). and forklift conveyors, loadports, storage or stocker shelves and workstations properly working with.
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IDC 450mm RSA PGV
IDC’s 450 mm RSA Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual transfer of 450 mm FOUPs, FOSBs and MAC. The PGV can easily interface with any process tool that conforms to the SEMI E154 loadport standard, and is equipped with a SEMI E83 compatible PGV docking flange.
半導体製造装置用語集(Factory Integration) - SEAJ
APC(Advanced Process Control) 、SPC(Statistical Process Control)やFDC(Fault Detection and Classification)等の技術を利用した先進的な装置制御の総称。 バッテリを原動力とした無人搬送車。 軌道レールを必要とせず、床に貼られたガイドテープなどを追従する。 尚、バッテリへの充電を移載中に行うこと(移載中充電)により、搬送能力を高めることができる。 無軌道式無人搬送車とも言われている。 搬送設備、保管設備、搬送管理設備などを組み …
The evaluation of manual FOUP handling in 300-mm wafer fab
To solve the increased workload problem in manual wafer handling, some personal guided vehicles (PGVs) have been developed to help in the transfer of front opening unified pods (FOUP). This study compares two kinds of PGVs with a traditional cart and evaluates the feasibility of using them for manual FOUP handling tasks.