FOUP Buffer (FOUP Handling Robot) | Industrial Transfer Robots …
FOUP feeding time is shortened significantly by utilizing its unique two-robot-arms configuration; Capable of stocking more than twenty FOUPs at once; Z-axis foldable construction satisfies …
3D NAND 学习笔记--晶圆传送 wafer transfer - 知乎 - 知乎专栏
在芯片制作过程中，免不了要谈到晶圆传送。在此以LAM E6机台作为案例介绍芯片制作过程中wafer transfer flow。 MES 派工后，内含25片wafer的FOUP（Front Opening Unified Pod，前 …
Semiconductor | FOUP Handling Robot | Robots and Design
Robots and Design’s FOUP Handling Robot, mounted to an AGV (Automated Guided Vehicle), handles 12” FOUP. The maximum payload is 25kg, and it has a wide motion range with …
半导体Foup的自动搬运案例|欧姆龙自动化（中国）有限公司官网
该设备主要实现半导体工厂中用于装硅片的Foup的运输工作，将前道工艺设备完成的部件至于LoadPort，再将LoadPort上的部件运输至对应的Foup货架。 目前装硅片的Foup运输环节是由 …
Automatic Transport Systems for Pods or Foups - ATG Technologies
ATG Technologies specializes in the automation and integration of pods and foups transport systems for the semiconductor fab process. An Autonomous Mobile Robot (AMR) is a robot …
Mobile robot for 300mm FOUP transportation and handling tasks Our HERO®FAB series combines an established, clean and safe 6-axis robot system with a free-moving vehicle. It is …
The SR200 robot controller is equipped with various functions that enable safe, high-accuracy wafer transfer. This function determines the status of wafer insertion in the FOUP. The …
CoMoBot™ - FOUP/PODS Mobile Handling Robot - Focussia, …
The Comobot™ Mobile Manipulator is perfect for transporting FOUPS and PODS to places not accessible by OHTs. This device integrates SECS/GEM/E84 standards and is ideal for …
ROBOT - 三和技研股份有限公司
Steady transfer with unique clamping devices and optimized speed. Dirty and clean batches separated by isolating front end/back end (dirty/clean) wafers with separate touch areas. …
300mm (氮气) 晶圆盒传送存储系统-北京华丞电子有限公司
晶圆装载系统（Load Port）、晶圆运输机器人（Robot）、晶圆对准器（Aligner）是最核心的三大部件。EFEM设备内部带有多重互锁保护，保障晶圆传输过程中，人员与设备的安全。3工 …
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