2021年12月1日 · Valence band XPS of the HZO (a) and HZLO (b) samples before and after ion bombardment (symbols), as well as the calculated ones for the perfect crystals and for crystal …

2023年9月1日 · In this study, the influences of TiN and W electrodes on the ferroelectric properties of HZO thin films were investigated. The XPS results revealed that the initially …

Hf4f and Zr3d XPS of the initial HZO and HZLO samples can be well approximated by single doublets (Fig. 2). The position of the Hf4f 7/2 maximum at the energy of 17.0 eV corresponds …

2025年3月18日 · Here we report an oxygen-vacancy-implanted Hf 0.5 Zr 0.5 O 2 (HZO) ... The valence states analysis of Zr, O, and Hf within the HZO was performed on an XPS ...

2022年10月6日 · The decreased oxygen vacancies in HZO films were experimentally verified with the reduced binding energy of Hf 4f and Zr 3d on XPS spectra (i.e., Hf 4f and Zr 3d peaks …

2022年9月1日 · In this study, we present a groundbreaking methodology for achieving highly selective deposition of Hf 1-x Zr x O 2 (HZO) thin films through catalytic local activation on …

2021年3月22日 · Results are compared with valence band offsets determined using the three-sample X-ray photoelectron spectroscopy (XPS) as well as the two-sample hard X-ray …

2021年4月22日 · The surface chemical compositions of the PLD-HZO grown with three distinct working \(P_{O_2}\) = 0.1, 1, and 100 mTorr are analyzed using XPS, and the spectra are …

2021年8月2日 · In the first part of this paper, we study the impact of sputtering conditions on HZO film properties in terms of stoichiometry, chemical composition, deposition rate, and the …

HfO 2 doped with Zr to form Hf 1−x Zr x O 2 or hafnium zirconium oxide (HZO) offers several advantages, such as a large composition space allowing orthorhombic phase formation and …