The 3935 and 3920 EP broadband plasma defect inspection systems support wafer-level defect discovery, yield learning and inline monitoring for ≤5nm logic and leading-edge memory design nodes.

2024年5月30日 · Our latest broadband plasma inspection systems include the 3935 Super Resolution Broadband Plasma Patterned Wafer Defect Inspection System and 2965 …

View KLA's A to Z product listing of inspection, metrology and data analytic systems for chip, reticle, packaging, compound semi and HDD manufacturing.

KLA-Tencor: Having Fun with LSPs and Beyond At K-T, we are pushing LSP performance to orders of magnitude higher brightness and power than alternative broad-band CW source in UV-DUV-VUV spectral regions.

These features include a high numerical aperture (NA), a tunable illuminator covering DUV, UV and visible wavelengths, selectable optical aper-tures, and advanced automatic defect classification capability.

2024年9月3日 · CryoTemp晶圆旨在校准、改善均匀性和匹配静电吸附盘 (ESC)上的温度曲线，可实现对等离子体蚀刻腔体的快速工艺表征和控制. 监测并记录晶圆在设备传送路径上的振动和加速度。 完成记录过程后，数据通过外部读取站下载到电脑中. 用于芯片制造厂的生产性机器学习平台；提高了关键缺陷 (DOI)的捕获率。 SPTS提供用于厚铝沉积的PVD工艺，以在300mm晶圆上形成焊盘。 是业界标准的裸晶圆几何测量系统。 晶圆制造商将其用于认证抛光和外延200mm硅晶圆.

For 40 years our broadband plasma (BBP) patterned wafer inspectors have been at the forefront of defect discovery for the semiconductor industry. Introduced in 1984, the KLA 2020 was the first automated patterned wafer inspection system for chip production, replacing manual inspection by human operators.

2016年7月12日 · 革命性的 3900 系列宽波段等离子光学检测仪采用新型超分辨率深紫外线 (SR-DUV) 波长范围和光刻机级别的机台精准性产生卓越的光学分辨率，经证实能够侦测 10 纳米以下缺陷。 2930 系列宽波段等离子光学检测仪采用 DUV/UV 波段，可以作为对于3900 系列波长范围的补充，确保在所有工艺层上的良率相关缺陷侦测均能达到最佳对比度。 两款宽波段等离子光学检测仪可在大约 1 小时内提供完整的晶圆检测，允许采集晶圆级和批次级缺陷数据，藉此全面理解 …

2024年9月25日 · 半导体检测领域的领头羊KLA科磊（简称KLA）的产品线广泛且深入，覆盖了半导体制造和相关电子行业的多个关键环节。 KLA的产品线主要包括用于检验、测量、数据分析的系统以及软件等，这些产品广泛应用于IC、晶圆和掩模的研发和制造过程中。

In advance of SEMICON West, KLA-Tencor Corporation (NASDAQ: KLAC) was introduced advanced wafer defect inspection and review systems for leading-edge IC device manufacturing: the 3900 Series (previously referred to as Gen 5) .