High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools Abstract: For the last 8 years, the brightness of UV lightsources in KT Broadband inspection tools increased by orders of magnitude due to advances in LSP technology. Challenges of LSP in high-power regime are discussed here. ... the brightness of UV ...

used for LSP is inverse Bremsstrahlung. Not so for near-IR lasers! Much of the absorption comes from bound-bound transitions in highly excited neutrals (theoretical spectra on the right). Absorption coefficients are much lower in near-IR, enabling much smaller, higher pressure LSP. Typical CO 2-sustained plasmas are a few cm in size. Typical ...

2015年5月12日 · Wafer Inspection Division, KLA-Tencor Corp, One Technology Drive, Milpitas, ... LSP (Laser Sustained Plasma) has a higher temperature than arc discharge plasma without electrodes. So, the LSP is a ...

2017年10月27日 · Wafer Inspection Division, KLA-Tencor Corp, One Technology Drive, Milpitas, CA 94035 4 KLA-Tencor Corp. Motivation: high-brightness UV light sources for wafer inspection

2015年5月10日 · Challenges of LSP in high-power regime are discussed here. ... {High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools}, author={Ilya Bezel and Gildardo Delgado and Matthew Derstine and Kerstin Gross and Richard W. Solarz and Anatoly Shchemelinin and D. Jeffrey Shortt}, journal={2015 Conference on Lasers and ...

KLA-Tencor: Having Fun with LSPs LSP responds to the pump laser profile and can be shaped as needed. At K-T, we are pushing LSP performance to orders of magnitude higher brightness than any alternative broad-band source. Optimal LSP operating conditions depend on the spectral region for collection, etendue requirements, and available pump power

CLEO: 2015 - High Power Laser-Sustained Plasma Lightsources for KLA-Tencor Broadband Inspection Tools ... the brightness of UV lightsources in KT Broadband inspection tools increased by orders of magnitude due to advances in LSP technology. Challenges of LSP in high-power regime are discussed here.

Challenges of LSP in high-power regime are discussed here. High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools-会议-万方数据知识服务平台 检测到您正在使用 Safari 浏览器，可能影响导出功能的正常使用，建议您下载 Google Chrome 、 Microsoft Edge 、 Firefox 。

2017年10月27日 · KLA-T encor: Having Fun with LSP s and Beyond At K -T , we are pushing LSP performance to orders of magnitude higher brightness and power than alternative broad-band CW source in UV -

Challenges of LSP in high-power regime are discussed here. 展开 . 关键词： light sources optical testing plasma sources KLA-Tencor broadband inspection tools LSP technology brightness high power laser-sustained plasma light sources Brightness Broadband communication Inspection.