2022年12月6日 · KLA’s comprehensive portfolio of inspection, metrology & data analytic systems helps manufacturers manage yield through the entire IC fabrication process.

The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring.

KLA’s defect inspection and review systems cover the full range of yield applications within the chip manufacturing environment, including incoming process tool qualification, wafer qualification, research and development, and tool, process and line monitoring.

View KLA's A to Z product listing of inspection, metrology and data analytic systems for chip, reticle, packaging, compound semi and HDD manufacturing.

2023年4月4日 · KLA Instruments offers profilometers, nanoindenters, thin film reflectometers, sheet-resistance tools and defect inspection and metrology systems.

High sensitivity, high throughput wafer surface inspection tool, with integrated surface scattering and photoluminescence technology for defect detection and classification of topographic and crystallographic defects on SiC and GaN based power devices.

KLA’s wafer manufacturing portfolio includes defect inspection and review, metrology and data management systems that help manufacturers manage quality throughout the wafer fabrication process.

KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.

KLA Pro Systems provides a variety of certified and remanufactured tools to meet almost every customer’s needs. Many device components serving the IoT, automotive, mobile, µLED and other specialized market segments today use larger design nodes or …