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The basic function of the Auto Etch is to etch wafers using a plasma dry etch process. Two systems available to perform this function are the Model 490 for poly-nitrides and the Model 590 for oxides.

OBJECTIVE: TO EFFECTIVELY PM THE LAM 490 CHAMBER IN A TIMELY MANNER, WHILE IMPROVING TOOL PERFORMANCE AND REDUCING PARTICLE DEFECTS

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Model: Lam AutoEtch 490, the most popular model for 4 to 6 inch wafer plasma etcher. The gap between top and bottom electrode is adjustable, which make the etcher more flexible with much better performance. Category: Plasma Etch. Original Equipment Manufacturer: Lam Research. Main Etcher Materials: Si, poly Si, SixNx etc.

2024年3月8日 · 1.1 The Lam Research Corporation (LRC) Lam AutoEtch 490 is an in-Line cassette to cassette, fully automated, single wafer, double air-locked, parallel plate plasma etching system. The etching program is saved on a recipe programming module.

LAM 490 PLASMA ETCH FOR 6000Å POLY Parameters Endpoint 1 Press field select to change to endpoint setup screen and edit the following Sampling A only [520 nm ch 12] Active during step 02 Delay 15 sec before normalizing Normalize for 10 sec Trigger @ 90% of normalized value

制造商: Lam Research 成色： 由Allwin21全面翻新并升级 晶圆尺寸: 4″/5″/6″ 传片系统: 全自动, 原装机械传片系统 等离子电源: 射频,13.56MHz 类型: 晶圆水平放置，单片工艺，等离子刻蚀，独立机台 刻蚀材料： 多晶硅，金属硅化物和氮化物

2023年6月12日 · Find many great new & used options and get the best deals for Lam Research Lam AutoEtch 490 590 690 790 Monitor. Used at the best online prices at eBay! Free shipping for many products!

Lam AutoEtch 490 description for reference. 1.1 The Lam Research Corporation (LRC) Lam AutoEtch 490 is an in-Line cassette to cassette, fully automated, single wafer, double air-locked, parallel plate plasma etching system. The etching program is saved on …