Our broad portfolio of market-leading products for thin film deposition, plasma etch, photoresist strip, and wafer cleaning are complementary processing steps used throughout semiconductor manufacturing.

At Lam, we relentlessly pursue innovation that pushes the boundaries of technical limitations, creating solutions that enable chipmakers to power progress. No matter what innovation means to you, we won’t stop until it’s proven. Breakthrough isn’t just a product. It’s a process. Making semiconductors is a highly complex and iterative process.

Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices. These market-leading conductor etch products deliver the high-performance precision and control at …

2024年12月5日 · The LAM 9400 SE is a high density plasma etch tool manufactured by LAM Research Corporation. This tool was originally designed for production polysilicon etching, but has been reconfigured for silicon based materials, III‐Vs, some metals, and organic materials.

As an integration to its production LAM Technologies offers a series of tool kits and software applications for the configuration and diagnostic of its own products. Some programs are free and registered users can download them directly from the site.

2025年2月19日 · Lam Research Corp. (Nasdaq: LRCX) today unveiled ALTUS® Halo, the world's first atomic layer deposition (ALD) tool that harnesses the capabilities of the metal molybdenum in the production of...

FREMONT, Calif., Feb. 19, 2025 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced Akara ®, a breakthrough innovation in plasma etch and the most advanced conductor etch tool ...

2022年2月9日 · The Lam selective etch portfolio is composed of three new tools: Argos, with revolutionary MARS™ ( Metastable Activated Radical Source ) technology, selectively modifies and decontaminates...

FREMONT, Calif., Feb. 19, 2025 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today unveiled ALTUS ® Halo, the world's first atomic layer deposition (ALD) tool that harnesses the capabilities ...

2024年3月26日 · Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency...