Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices.

Some key areas of research include nanoinstrumentation nano energy conversion, nano bioengineering and nano computing storage. The field of nanoengineering is highly interdisciplinary, requiring knowledge drawn from a variety of …

MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.

2024年10月28日 · Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high...

前者采用硅基微纳加工工艺，可实现批量的电容式高精度 mems加速度传感器芯片，目前该项成果的相关技术指标属于在国际上并跑状态，并已经成果搭载长征五号b型火箭在我国新一代载人航天飞船试验船上进行过微重力环境测量应用，性能卓越，技术可靠，成熟 ...

Micro- and nano-scale sensors for acceleration, rotation, velocity, pressure, stress, temperature, based on a variety of physical principles, from solid-body or gaseous mechanical displacement, to expansion/contraction, to atomic spin reorientation

Research in the area of nanotechnology focuses on nanomaterials such as nanotubes and nanowires and their applications, especially in nanoelectromechanical systems (NEMS). A laboratory is available for the synthesis of carbon nanotubes and semiconductor nanowires using chemical vapor deposition (CVD) techniques and to build devices using ...

2020年10月13日 · Nanoelectromechanical systems (NEMS) are devices integrating electrical and mechanical functionality on the nanoscale. NEMS forms the logical next miniaturization step from...

纳电子 机械系统 是基于 MEMS 技术而提出的一个新概念，是指在特征尺寸和效应上具有纳米技术特点的一类超小型 机电一体化 研究领域，包括特征尺寸在亚纳米到数百纳米并以纳米级结构所产生的 量子效应 、 界面效应 和以纳米尺度效应为工作特征的器件和系统。 过去20年中，人们一直在积极地研究 MEMS，随着制作工艺精度的提高，器件尺寸迅速减小，出现了纳米尺度的MEMS，这就是纳电子 机械系统 （NEMS）。 NEMS是基于 MEMS 技术而提出的一个新概 …

2023年10月25日 · 前者采用硅基微纳加工工艺，可实现批量的电容式高精度MEMS加速度传感器芯片，目前该项成果的相关技术指标属于在国际上并跑状态，并已经成功搭载长征五号B型火箭在我国新一代载人航天飞船试验船上进行过微重力环境测量应用，性能卓越，技术可靠，成熟度高。 后者采用量子精密传感相关技术，采用光学方案作为信号读出手段，有望突破标准量子极限噪声，实现更高精度和灵敏度的探测。...