
Mechanisms of plasma polymerization of various silico-organic …
1994年9月1日 · Finally, OMCATS polymerizes via the formation of polymethylsiloxane chains and rings. These various mechanisms result in differences in the properties of the polymer films. In contrast, almost inorganic films were obtained with oxygen irrespective of the monomer.
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电子级八甲基环四硅氧烷(OMCTS)_产品平台_中关村集成电路产 …
八甲基环四硅氧烷是低温化学气相沉积制备高质量低介电常数(低k)金属层间介质薄膜的重要硅源前驱体。 用于光纤预制棒和集成电路制造的有机硅原料必须达到6N甚至9N以上,而一般商业化的八甲基环四硅氧烷通过普通提纯后含量只有99%,且含有杂质重金属离子,会对光纤预制棒和集成电路材料的制造造成严重影响,重金属离子去除困难是造成该材料依赖进口的主要原因。 产品指标:组分纯度:≥99.99%,总杂质≤5ppb;水≤5μg/g;Cl<2ppm,颗粒度(≥0.2μm)≤10 …
八甲基环四硅氧烷 (OMCTS) 沉积的等离子体聚合 SiOCH 薄膜的孔 …
摘要 在本研究中,以八甲基环四硅氧烷 (OMCTS) 为前驱体,通过等离子体增强化学气相沉积 (PECVD) 在混合纤维素酯 (MCE) 基底上制备了用于气体分离的 SiOCH 薄膜。 射频功率是调节 SiOCH 膜孔结构的主要变量。 FTIR 分析表明,随着射频功率的增加,Si-O-Si 环发生断裂。 根据正电子湮没寿命光谱 (PALS) 表征,SiOCH 薄膜具有两种不同的孔径,如下所示:形成基体结构的 τ 3 和代表大笼子的 τ 4 。 基质结构的孔隙半径范围为 3.52–3.78 A,大笼的孔隙半径范围为 …
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(PDF) Characterization of low-dielectric constant SiOCN films ...
2001年8月1日 · Films composed of Si, C, O and N have been deposited by low pressure chemical vapour deposition (LPCVD) from different chemical systems: pyrolysis of C3N3Cl2N (SiMe3) (2) and interaction between...
Octamethylcyclotetrasiloxane (OMCTS) is an important pre- cursor used in the chemical vapor deposition (CVD) of low-k inter-metal dielectric films (IMDs) for sub-0.25 μm IC intercon-nects. Typically film thicknesses of up to one micron are deposited with dielectric constant (k value) of approximately 2.8 can be prepared with OMCTS.
Detailed OMCTS/H - ScienceDirect
2018年2月1日 · Detailed chemical kinetics of OMCTS/H 2 /O 2 is critical for the prediction of flame characteristics, vapor nucleation, particle growth and deposition in the synthesis process.
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Health & Environmental Research Online (HERO)
The plasma polymerization of hexamethyl disiloxane (HMDSO), divinyltetramethyl disiloxane (DVTMDSO), and octamethyl cyclotetrasiloxane (OMCATS) was investigated using either argon or argon/oxygen mixtures as reactants. With argon, different mechanisms of polymerization for each polymer were identified reflecting its respective nature.
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