2012年12月1日 · The scanning electron microscope (SEM) is performed to study the surface morphology, grain structure and grain boundaries. The SEM image helps us to understand the surface wave propagation and scattering phenomena by the PZT and the reason for its anisotropy and inhomogeneity due to the grain structure.

2022年11月1日 · SEM is a surface imaging technique in which a focused beam of electrons scans the surface of the sample and produces secondary and backscattered electrons, based on the interaction with the sample, that are utilized to generate the sample’s topographical image.

2023年4月15日 · X-ray diffraction (XRD), Field-emission scanning electron microscope (FE-SEM), Wavelength dispersive X-ray spectroscopy (WDS), and atomic force microscope (AFM) were used to characterize the physical characteristics and properties of the prepared PZT thin films, including crystallization behavior, thickness, microstructure, chemical composition ...

本文用扫描力显微镜的压电响应模式, 研究了Sol-Gel法制备的PT/PZT/PT夹心结构铁电薄膜 的自发极化电畴结构, 用电场力响应模式对其极化保持特性进行了研究. 1 实验 PT/PZT/PT铁电薄膜采用Sol-Gel技术制备, 基片为 Pt(111)/Ti/SiO2/Si(100). 以醋酸铅

采用x射线衍射(xrd)、场发射扫描电镜(fe-sem)、波长色散x射线能谱(wds)和原子力显微镜(afm)对制备的pzt薄膜的物理特性和性能进行表征，包括结晶行为、厚度、微观结构、化学成分和形貌。

Titanate (PZT) thin films in the range of 2 µm to 8 µm have been successfully deposited on silicon substrates using an improved set-up for a novel high rate sputtering process. An optimised, rectangular cathode geometry (width 250 mm) allows homogenous PZT deposition on temperature controlled wafers up to 200mm diameter. Deposition rates

2023年3月20日 · The effect of relaxor ferroelectric PZN content on the phase structure, dielectric, piezoelectric and ferroelectric properties of xPZN–PZT ceramics has been systematically investigated. The XRD and SEM analysis results showed a slight increase in grain size with the increase in PZN content.

We present in this paper, the results of our effort to implement cost-effective, PZT capacitor integration into high volume manufacturing. The HRe process module manufactured by Tegal Corporation...

2024年8月1日 · The crystal structure and orientation of Sm-PZT films were analyzed by X-ray Diffraction (XRD) (λ = 1.5406 Å, 10° ≤ 2θ ≤ 60°). Surface morphology and cross-sectional images of the films were characterized by Scanning Electron Microscope (SEM) (Nova NanoSEM 650, FEI), and the thickness of the films was obtained.

Highly (100)- and (111)-oriented lead zirconate titanate (PZT) films with a thickness of 350 nm were deposited on platinized Si substrates through a single spinning of a PZT sol containing...