In Plasma Ion Assisted Deposition (PIAD) processes, changes in oxygen gas concentration are principally detectable by means of plasma emission spectroscopy.

We introduce the Pose and Illumination agnostic Anomaly Detection (PIAD) problem, a generalization of pose-agnostic anomaly detection (PAD). Being illumination agnostic is …

2019年3月1日 · In this paper recent results on monitoring and control of plasma ion assisted deposition (PIAD) processes are presented. An industrial PIAD system equipped with …

2008年9月25日 · In the case of plasma ion assisted deposition (PIAD) processes either quartz crystal monitoring or optical monitoring are commonly applied to control thickness of the …

In Plasma Ion Assisted Deposition (PIAD) processes, changes in oxygen gas concentration are principally detectable by means of plasma emission spectroscopy. The purpose of this paper …

2008年9月1日 · We present and discuss an in situ optical characterization methodology for calculating individual film thicknesses and optical constants of a multilayer coating. The …

2019年3月1日 · In this paper recent results on monitoring and control of plasma ion assisted deposition (PIAD) processes are presented. An industrial PIAD system equipped with …

beam source employed for PIAD are presented. Data on electron and ion kinetics as well as optical emission facilitated a comprehensive understanding of underlying

New methods support people in their daily and professional tasks and make it possible to automate many processes that previously required strenuous manual work. A particularly …

2014年12月1日 · Anatase TiO 2 films were synthesized on glass substrates using a plasma ion assisted deposition (PIAD) without external heating or subsequent annealing. The low …