INFICON ALD 传感器将石英晶体微天平（QCM）测量的可重复性、精确性和耐用性带入原子层沉积 (ALD)。 ALD 传感器可承受高达 450ºC 的高温，设计在严苛的 ALD 应用环境中运行。

XP8 QCM is a 300mm tool for high-productivity plasma enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber Module, is a process module with four tightly integrated process reactors.

INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application.

INFICON ALD 传感器将石英晶体微天平（QCM）测量的可重复性、精确性和耐用性带入原子层沉积 (ALD)。 炫酷抽屉双传感器设计用于在真空室中需要第二晶体的关键过程。 炫酷抽屉单传 …

2002年8月1日 · An in situ quartz crystal microbalance (QCM) in the reaction zone is used for monitoring the ALD film growth. By modifying a commercially available QCM housing and using polished QCM sensors, quantitative thickness measurements of the thin films grown by ALD are obtained in real time.

Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.

厦门韫茂科技公司研发的超小型桌式 ALD 原子层沉积设备是先进材料研究的有力设备之一，它可以在4寸晶元（向下兼容）和微 纳米粉体 上实现均匀可控的原子层沉积，具有广泛的应用领域，设各配有独立控制的300℃完整加热反应腔室系统，保证工艺温度均匀 ...

2019年1月23日 · ASM International N.V. (Euronext Amsterdam: ASM) today introduced its XP8 QCM tool for high-productivity 300mm single-wafer plasma enhanced atomic layer deposition (PEALD) and plasma enhanced chemical vapor deposition (PECVD) applications. The QCM, or Quad Chamber Module, is a process module with four tightly integrated process reactors.

2019年1月23日 · The QCM, or Quad Chamber Module, is a process module with four tightly integrated process reactors. Up to four QCM modules can be configured to each XP8 platform, enabling processing of up to 16 wafers at a time.

XP8 QCM is a 300mm tool for high-productivity plasma-enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber Module, is a process module with four tightly integrated process reactors.