Atomic layer deposition of silicon-based dielectrics for …
2019年9月24日 · To enable the growth of these Si-based dielectric films, semiconductor manufacturers are transitioning from chemical vapor deposition to atomic layer deposition …
The improvement of atomic layer deposited SiO2/4H-SiC …
2021年2月1日 · An alternative to the thermal oxidation of SiC is the deposition of SiO 2 via atomic layer deposition (ALD), which offers high conformity and fine control of the deposition process. …
Progresses in Synthesis and Application of SiC Films: From CVD to ALD …
2020年8月24日 · This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In …
用于半导体制造的硅基电介质的原子层沉积：现状和未来展 …
2019年9月24日 · 在这篇重点综述中，作者研究了这三种硅基介电薄膜的热辅助 ALD 和等离子体辅助 ALD 的状态。 对于 SiO2 ALD，由于沉积高质量薄膜的低温工艺是已知的，因此作者主要 …
Effect of surface treatments on ALD Al2O3/4H-SiC metal–oxide ...
2021年2月18日 · Nitridation of the SiC surface followed by H 2 annealing prior to ALD was found to be the best 4H-SiC surface treatment resulting in MOSFETs with peak field-effect mobility of …
Understanding the Mechanism of SiC Plasma-Enhanced Chemical …
2018年4月10日 · Understanding the mechanism of SiC chemical vapor deposition (CVD) is an important step in investigating the routes toward future atomic layer deposition (ALD) of SiC. …
AlN grown on SiC.12 Atomic layer deposition (ALD) is an advanced technique for accurate preparation of high-quality nanoscale thin lms. Based on self-limiting reactions and layer-by …
Interfacial modification mechanism of ALD-SiO2/4H-SiC ... - Springer
2022年12月1日 · Atomic layer deposition (ALD) can effectively suppress the carbon clusters generation at the SiO2/4H-SiC heterojunction interface and RTA in the synergistic N2/O2 can …
SiC Plasma Enhanced Atomic Layer Deposition Publications - plasma-ald…
Your search for plasma enhanced atomic layer deposition publications discussing SiC films returned 2 record (s). If there are too many results, you may want to use the multi-factor …
ald在sic上的运用 - 百度文库
ALD技术在SiC器件制备中发挥着关键作用，它能有效地提高SiC薄膜的密度、均匀性和电学性能。 1.预处理：采用化学气相沉积（CVD）或其他方法在SiC基板上制备一层均匀的SiC薄膜作为底 …