Growth mechanism of epitaxial YSZ on Si by Pulsed Laser Deposition …
2018年4月10日 · In order to avoid these issues, yttria-stabilized zirconia (YSZ) can be used as a buffer layer to incorporate epitaxial oxides on Si. During growth in reducing conditions, the …
Epitaxial growth of high-quality yttria-stabilized zirconia films with ...
2023年3月15日 · High-quality (100)-oriented yttria-stabilized zirconia (YSZ) films with uniform thickness were epitaxially grown on silicon substrates by a two-step process of pulsed laser …
Epitaxial Growth of β-Ga2O3 Thin Films on Si with YSZ Buffer Layer
2022年11月24日 · Owing to the small lattice mismatch with Si (Fm3̅m, cubic, 5.431 Å), YSZ can be grown epitaxially on Si. The epitaxial YSZ layers on Si can function as a buffer layer to …
宽禁带科技论|使用激光图案化衬底方法在Ir/YSZ/Si (001)复合衬底 …
2024年7月8日 · 该成果以“ Growth of two-inch free-standing heteroepitaxial diamond on Ir/YSZ/Si (001) substrates via laser-patterned templates ”为题目，在Journal of Semiconductors上以短通 …
MBE Growth of the top Layer in Si/YSZ/Si Structure
Yttria-stabilized zirconia (YSZ) films were used as insulator layers in silicon-on-insulator structures. YSZ films on Si substrates were grown epitaxially by “off-axis” rf magnetron …
热应力辅助退火提高硅上外延 YSZ 缓冲层的结晶 ... - X-MOL
2022年6月29日 · 氧化钇稳定氧化锆 (YSZ) 是一种出色的缓冲层，可通过脉冲激光沉积 (PLD) 和溅射等低成本沉积技术在硅上外延生长，以实现新型电子器件，其中各种外延功能氧化物集成在 …
Yttria-stabilized zirconia films of different composition as buffer ...
2006年4月1日 · Diamond/iridium/yttria-stabilized-zirconia (YSZ)/silicon is a promising multilayer structure for the future realization of single crystal diamond wafers. In the present work we …
In situ boron doping during heteroepitaxial growth of diamond on Ir/YSZ/Si
2012年8月8日 · In situ boron doping of heteroepitaxial diamond films grown by microwave plasma chemical vapor deposition on Ir/YSZ/Si (001) is investigated. The study comprises the analysis …
Growth, stress, and defects of heteroepitaxial diamond on Ir/YSZ/Si ...
2018年6月11日 · In the present work, heteroepitaxy of diamond on Ir/YSZ/Si (111) with different off-axis angles and directions has been studied. During the growth of the first microns, strong …
Epitaxial Growth of β-Ga2O3 Thin Films on Si with YSZ Buffer Layer
2022年12月12日 · Using high-resolution X-ray diffraction (HRXRD), we analyzed domain structures and strain states of monoclinic β-Ga 2 O 3 thin films on cubic YSZ-buffered Si …