China's SMEE files patent for an EUV chipmaking tool — tool aims …
2024年9月13日 · This week, it turned out that Shanghai Microelectronics Equipment (SMEE) had applied for a patent covering an EUV lithography machine, reports the South China Morning …
上海微电子公开“极紫外辐射发生装置及光刻设备”的发明专利
2024年9月11日 · 极紫外光刻技术（EUV lithography）是一种使用波长为13.5纳米的极紫外光作为光源的下一代光刻技术，广泛应用于半导体制造中，是面向7nm及以下节点的主流光刻技术。
突破欧美围堵！国内公司取得7nm或以下芯片关键技术_凤凰网
2024年9月18日 · 最近中国上海微电子设备（集团）股份有限公司 (SMEE)，公布了一系列制造7nm及以下芯片关键能力的专利，或许可以突破欧美的科技围堵。 中国国家智慧财产局于9 …
国产光刻机再迎突破！上海微电子新专利挑战ASML霸主地位
2024年9月22日 · 国产光刻机领域再迎重大突破，上海微电子装备集团（smee）悄然申请了一项关于极紫外（euv）光刻机的专利。 这项专利不仅瞄准了EUV光刻机制造的第二大难点——光源 …
Chinese chip making shows progress with new EUV patent from …
2024年9月12日 · A newly revealed patent from Chinese lithography systems maker Shanghai Micro Electronics Equipment (SMEE) shows how domestic firms could progress in the local …
China Is Close To Manufacturing Their Own EUV Machines To …
2025年3月12日 · Rumors are spreading about China’s efforts to create its own Extreme Ultraviolet (EUV) lithography machines, which could potentially bypass restrictions on advanced …
New EUV patent hints Huawei could progress in chip ... - Huawei …
2024年9月13日 · SMEE (Shanghai Micro Electronics Equipment) filed a new EUV patent. It is entitled “extreme ultraviolet [EUV] radiation generators and lithography equipment”. The patent …
Chinese chip making shows progress with new EUV patent from …
Shanghai Micro Electronics Equipment (SMEE) has filed a patent for EUV radiation generators and lithography equipment, pushing forward China's lithography advancements and …
Exclusive | Tech war: China quietly making progress on new …
2024年4月1日 · By using SAQP with deep ultraviolet lithography (DUV) machines from Dutch giant ASML and Japanese suppliers like Nikon, China could make sophisticated 5-nanometre …
SMEE patent highlights China’s progress in EUV tools
2024年9月13日 · The “extreme ultraviolet [EUV] radiation generators and lithography equipment” patent, filed in March 2023, was published on Tuesday and is still being vetted by the China …
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