CLEAN TRACK™ LITHIUS Pro™ Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production.

CLEAN TRACK™ LITHIUS Pro™ APは、高粘度材料やSpin-on Hard Mask材料へ対応するとともに、次世代パッケージング技術に必要なプロセス処理への最適化を図った300mmウェーハプロセス対応塗布現像装置です。 すでに多くのお客さまにご支持いただいているCLEAN TRACK™ ACT™ 12のコンセプトを継承し、高粘度材料やSpin-on Hard Mask材料へ対応するとともに、次世代パッケージング技術に必要なハードウェアやプロセスの最適化も図っています。

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Optimum temperature control during test, and increased of parallel die testing are achieved with the Precio™ prober series. TEL provides a series of reliable solutions to the increasing number of probing demands.

2022年9月1日 · lithius涂胶显影设备是在光刻工序中和光刻机配套使用的机器，主要起到涂胶、烘烤和显影的作用。 涂胶显影设备是集成电路生产过程中不可获缺的设备，能够直接影响到光刻工序中曝光图案的形成。 涂胶显影设备主要应用…

CLEAN TRACK™ LITHIUS Pro™ Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production.

ncluding equipment adjustments. The CLEAN TRACKTM LITHIUS ProTM is designed to enable adjustments for time-related changes in equipment operations without having to involve an engineer, thus maximizing the pe. iod of production contribution. Moreover, the equipment is repeatedly load tested to ensure the highest possible leve.

2017年2月24日 · CLEAN TRACK LITHIUS Pro Z is TEL's most advanced 300mm process coater/developer for 20nm and beyond technology nodes. The LITHIUS Pro Z incorporates user-friendly operation, flexible configurations for future processes and automated monitoring technologies to support a wide range of applications for …

CLEAN TRACK™ LITHIUS Pro™ Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production.

TEL Lithius PRO-Z • Manufacturer: Tokyo Electron • Model: Lithius PRO-Z resist track • Wafer Size: 300mm • General: • Block 1: Carrier w/ Wafer Transfer Arm + Internal Stocker • Block 2: Process w/ Wafer Transfer Arm o 2-0 MRA o 2-10 MMRA o 2-20 MRA o 2-50 MRAS o 2-60 MMRA • Block 10: Process w/ Wafer Transfer Arm o 10-0 MPRA o 10 ...